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Software Automation and Optimization of an X-ray Microscope Custom Designed for Integrated Circuit Inspection

Published online by Cambridge University Press:  10 August 2018

Michael Sutherland ,
Christopher Powell  and
Skylar Downes
Michael Sutherland*
Affiliation:
Defense Microelectronics Activity, McClellan Park, USA
Christopher Powell
Affiliation:
Defense Microelectronics Activity, McClellan Park, USA
Skylar Downes
Affiliation:
Defense Microelectronics Activity, McClellan Park, USA
*
*Corresponding author, michael.sutherland@dmea.osd.mil

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S2: Proceedings of the 14th International Conference on X-ray Microscopy (XRM2018) , August 2018 , pp. 112 - 113
Copyright
© Microscopy Society of America 2018 

References

[1] Sutherland, M. Laboratory based X-ray imaging for non-destructive integrated circuit inspection," in Proc. 41st GOMACTech Conf, 2016) pp. 1–4.Google Scholar
[2] Sutherland, M. "MpiArray: open source software simplifies distributing NumPy arrays efficiently across a cluster." https://github.com/tomography/mpiarray, 2017-2018.Google Scholar
[3] Giirsoy, D., et al, "TomoPy: a framework for the analysis of synchrotron tomographic data," J Synchrotron Radiat, vol. 21, no. Pt 5, pp. 1188-1193, Sep 2014, pp5049[PII]. [Online]. Available: http://www.ncbi.nlm.nih.gov/pmc/articles/PMC4181643/ .CrossRefGoogle Scholar
[4] Jones, E., et alSciPy: Open Source Scientific Tools for Python, 2001-, http://www.scipy.org/ [Online; accessed 2018-02-21].Google Scholar
[5] Special thanks to Brandon Smith and Sahar Hihath for their critical review and to Jamesson Kaupanger, Jerry Fortier, Francis Nguyen, and Dante Gamboa for their expertise and superior sample preparation work, which is the foundation to any IC analysis..Google Scholar
[6] The views expressed in the article reflect those of the author and do not reflect the official policy or position of the Department of Defense or U.S. Government..Google Scholar