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Software Automation and Optimization of an X-ray Microscope Custom Designed for Integrated Circuit Inspection

  • Michael Sutherland (a1), Christopher Powell (a1) and Skylar Downes (a1)
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Abstract
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Corresponding author
*Corresponding author, michael.sutherland@dmea.osd.mil
References
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[1] Sutherland, M. Laboratory based X-ray imaging for non-destructive integrated circuit inspection," in Proc. 41st GOMACTech Conf, 2016) pp. 14.
[2] Sutherland, M. "MpiArray: open source software simplifies distributing NumPy arrays efficiently across a cluster." https://github.com/tomography/mpiarray, 2017-2018.
[3] Giirsoy, D., et al, "TomoPy: a framework for the analysis of synchrotron tomographic data," J Synchrotron Radiat, vol. 21, no. Pt 5, pp. 1188-1193, Sep 2014, pp5049[PII]. [Online]. Available: http://www.ncbi.nlm.nih.gov/pmc/articles/PMC4181643/ .
[4] Jones, E., et alSciPy: Open Source Scientific Tools for Python, 2001-, http://www.scipy.org/ [Online; accessed 2018-02-21].
[5] Special thanks to Brandon Smith and Sahar Hihath for their critical review and to Jamesson Kaupanger, Jerry Fortier, Francis Nguyen, and Dante Gamboa for their expertise and superior sample preparation work, which is the foundation to any IC analysis..
[6] The views expressed in the article reflect those of the author and do not reflect the official policy or position of the Department of Defense or U.S. Government..
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Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
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