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A Three Beam Approach to TEM Preparation Using In-situ Low Voltage Argon Ion Final Milling in a FIB-SEM Instrument

Published online by Cambridge University Press:  01 August 2005

E L Principe
Affiliation:
Carl Zeiss SMT,Inc.
P Gnauck
Affiliation:
Carl Zeiss SMT,Inc.
P Hoffrogge
Affiliation:
Carl Zeiss SMT,Inc.

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Copyright
© 2005 Microscopy Society of America