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Is Energy Resolution Still an Important Specification in EDS?

  • Keith Thompson (a1)
Extract

Energy Dispersive Spectroscopy (EDS) X-ray detectors have undergone a wave of technology enhancements since the first silicon drift-based EDS detector (SDD) was commercially introduced roughly 15 years ago. The first such EDS systems featured an active area of 5 mm2, an energy resolution between 160 eV–200 eV, and a maximum collection rate approaching only 100,000 input counts/second.

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Corresponding author
*keith.thompson@thermofisher.com
References
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[1]Goldstien, J, Newbury, DE, Joy, DC, Lyman, CE, Echlin, P, Lifshin, E, Sawyer, L, and Michael, JR, Scanning Electron Microscopy and X-ray Microanalysis, Springer, New York, 2003, pp. 311–12.
[2]Strueder, L, Meidinger, N, Stotter, D, Kemmer, J, Lechner, P, Leutenegger, P, Soltau, H, Eggert, F, Rohde, M, and Schulein, T, “High Resolution X-Ray Spectroscopy Close to Room Temperature,” microanalyst.net, published online July 1998, http://mikroanalytik.de/Download/sdd_publ.pdf.
[3]Amptek, Inc., “Amptek Silicon Drift Diode (SDD) at High Count Rates: AN-SDD-001 Rev B0,” http://www .amptek.com/pdf/ansdd1.pdf.
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Microscopy Today
  • ISSN: 1551-9295
  • EISSN: 2150-3583
  • URL: /core/journals/microscopy-today
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