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New Workflows Broaden Access to S/TEM Analysis and Increase Productivity

  • Brandon Van Leer (a1), Remco Geurts (a2), Raphaela Scharfschwerdt (a2), Huikai Cheng (a1), Letian Li (a2) and Robert Imlau (a2)...
Abstract

The DualBeam, which combines focused ion beam and scanning electron microscope (FIB-SEM), is regularly used for sample preparation in transmission electron microscopy (TEM). A DualBeam enables the user to thin specific regions of a bulk material to electron transparency. While this process is often performed manually, we describe an interactive guided TEM sample preparation process. By this method, the preparation process time is shortened for expert users, compared to manual processes, and enables novice users to obtain high-quality results routinely. The method can be used on almost any material to prepare thin lamellas for most common TEM applications.

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      New Workflows Broaden Access to S/TEM Analysis and Increase Productivity
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References
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[1] Giannuzzi, LA et al., Mater Res Soc Symp Proc 480 (1997) 1927.
[2] Van Leer, B and Wall, D, Microsc Microanal 19(S2) (2013) 868–6869.
[3] Wall, D. “Ultra-Fast In-Situ S/TEM Sample Preparation.” FEI Company Application Note P/N 04AP-FR0111, FEI Company (2007).
[4] Langford, RM and Petford-Long, AK, J Vac Sci Technol A 19 (2000) 21862193.
[5] Schaffer, M et al., Ultramicroscopy 114 (2012) 6271.
[6] Giannuzzi, LA et al., Introduction to Focused Ion Beams. Springer, New York, 2005, p 247268.
[7] Liu, F et al., J Vac Sci Technol A 34 (2016) 041510.
[8] Einfeldt, S et al., Appl Phys 92 (2002) 118123.
[9] Klingon, A and Srinivasan, S, Nat Mater 4 (2005) 233–3237.
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Microscopy Today
  • ISSN: 1551-9295
  • EISSN: 2150-3583
  • URL: /core/journals/microscopy-today
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