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Long-term Room Temperature Instability in Thermal Conductivity of InGaZnO Thin Films

  • Boya Cui (a1) (a2), D. Bruce Buchholz (a3), Li Zeng (a1), Michael Bedzyk (a1) (a3), Robert P. H. Chang (a1) (a3) and Matthew Grayson (a1) (a2)...

Abstract

The cross-plane thermal conductivities of InGaZnO (IGZO) thin films in different morphologies were measured on three occasions within 19 months, using the 3ω method at room temperature 300 K. Amorphous (a-), semi-crystalline (semi-c-) and crystalline (c-) IGZO films were grown by pulsed laser deposition (PLD), followed by X-ray diffraction (XRD) for evaluation of film quality and crystallinity. Semi-c-IGZO shows the highest thermal conductivity, even higher than the most ordered crystal-like phase. After being stored in dry low-oxygen environment for months, a drastic decrease of semi-c-IGZO thermal conductivity was observed, while the thermal conductivity slightly reduced in c-IGZO and remained unchanged in a-IGZO. This change in thermal conductivity with storage time can be attributed to film structural relaxation and vacancy diffusion to grain boundaries.

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1. Nomura, K., Ohta, H., Ueda, K., Kamiya, T., Hirano, M., and Hosono, H., Science 300, 1269 (2003).
2. Nomura, K., Ohta, H., Takagi, A., Kamiya, T., Harano, M., and Hosono, H., Nature 432, 488 (2004).
3. Hosono, H., J. Non. Cryst. Solids 352, 851 (2006).
4. Kamiya, T., Nomura, K., and Hosono, H., Sci. Technol. Adv. Mater. 11, 044305 (2010).
5. Chung, W.-F., Chang, T.-C., Li, H.-W., Chen, S.-C., Chen, Y.-C., Tseng, T.-Y., and Tai, Y.-H., Appl. Phys. Lett. 98, 152109 (2011).
6. Gosain, D.P. and Tanaka, T., Jpn. J. Appl. Phys. 48, 03B018 (2009).
7. Chowdhury, M.D.H., Mativenga, M., Um, J.G., Mruthyunjaya, R.K., Heiler, G.N., Tredwell, T.J., and Jang, J., IEEE Trans. Electron Devices 62, 869 (2015).
8. Seo, D.K., Shin, S., Cho, H.H., Kong, B.H., Whang, D.M., and Cho, H.K., Acta Mater. 59, 6743 (2011).
9. Cui, B., Zeng, L., Keane, D., Bedzyk, M.J., Buchholz, D.B., Chang, R.P.H., Smith, J., Marks, T.J., Yu, X., Facchetti, A.F., and Grayson, M. (submitted).
10. Cahill, D.G., Katiyar, M., and Abelson, J.R., Phys. Rev. B 50, 6077 (1994).
11. Yoshikawa, T., Yagi, T., Oka, N., Jia, J., Yamashita, Y., Hattori, K., Seino, Y., Taketoshi, N., Baba, T., and Shigesato, Y., Appl. Phys. Express 6, 021101 (2013).
12. Yang, B., Liu, W.L., Liu, J.L., Wang, K.L., and Chen, G., Appl. Phys. Lett. 81, 3588 (2002).
13. Zhou, C., Cui, B., Vurgaftman, I., Canedy, C.L., Kim, C.S., Kim, M., Bewley, W.W., Merritt, C.D., Abell, J., Meyer, J.R., and Grayson, M., Appl. Phys. Lett. 105, 261905 (2014).
14. Martins, R., Barquinha, P., Ferreira, I., Pereira, L., Gonçalves, G., and Fortunato, E., J. Appl. Phys. 101, 044505 (2007).
15. Yang, H. and Morelli, D.T., J. Electron. Mater. 41, 1720 (2012).
16. Zhang, X. and Sun, Z., Rare Met. 30, 317 (2011).
17. Tsuchihira, H., Oda, T., and Tanaka, S., Fusion Eng. Des. 85, 1814 (2010).
18. Katcho, N.A., Carrete, J., Li, W., and Mingo, N., Phys. Rev. B 90, 094117 (2014).
19. Che, J., Cagin, T., and Goddard, W.A. III, Nanotechnology 11, 65 (2000).

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