Skip to main content Accessibility help
×
×
Home

Focused Ion Beam Microscopy and Micromachining

  • C. A. Volkert and A. M. Minor

Abstract

The fairly recent availability of commercial focused ion beam (FIB) microscopes has led to rapid development of their applications for materials science. FIB instruments have both imaging and micromachining capabilities at the nanometer–micrometer scale; thus, a broad range of fundamental studies and technological applications have been enhanced or made possible with FIB technology. This introductory article covers the basic FIB instrument and the fundamentals of ion–solid interactions that lead to the many unique FIB capabilities as well as some of the unwanted artifacts associated with FIB instruments. The four topical articles following this introduction give overviews of specific applications of the FIB in materials science, focusing on its particular strengths as a tool for characterization and transmission electron microscopy sample preparation, as well as its potential for ion beam fabrication and prototyping.

    • Send article to Kindle

      To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

      Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

      Find out more about the Kindle Personal Document Service.

      Focused Ion Beam Microscopy and Micromachining
      Available formats
      ×

      Send article to Dropbox

      To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

      Focused Ion Beam Microscopy and Micromachining
      Available formats
      ×

      Send article to Google Drive

      To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

      Focused Ion Beam Microscopy and Micromachining
      Available formats
      ×

Copyright

References

Hide All
1.Mueller, E.W., Tsong, T.T., Field Ion Microscopy Principles and Applications (American Elsevier, New York, 1969).
2.Krohn, V.E., Ringo, G.R., Appl. Phys. Lett. 27, 479 (1975).
3.Seliger, R.L., Ward, J.W., Wang, V., Kubena, R.L., Appl. Phys. Lett. 34, 310 (1979).
4.Swanson, L.W., Nucl. Instrum. Methods Phys. Res., Sect. 218, 347 (1983).
5. For example, FEI Co., Carl Zeiss Inc., Seiko Instruments Inc., Hitachi Inc., JEOL Ltd., Orsay Physics.
6.Benninghoven, A., Rüdenauer, F.G., Werner, H.W., Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications and Trends (John Wiley, New York, 1987).
7.Prewitt, P.D., Mair, G.L.R., Focused Ion Beams from Liquid Metal Ion Sources (John Wiley, New York, 1987) p. 291.
8.Orloff, J., Rev. Sci. Instrum. 64, 1105 (1993).
9.Orloff, J., Swanson, L.W., Utlaut, M., J. Vac. Sci. Technol., B 14, 3759 (1996).
10.Nastasi, M., Mayer, J.W., Hirvonen, J.K., Ion-Solid Interactions: Fundamentals and Applications (Cambridge University Press, Cambridge, UK, 1996).
11.Chason, E. et al., Appl. Phys. Rev. 81, 6514 (1997).
12.Williams, J.S., Poate, J.M., Ion Implantation and Beam Processing (Academic, Sydney, 1984).
13.Orloff, J., Utlaut, M., Swanson, L., High Resolution Focused Ion Beams: FIB and its Applications (Kluwer Academic, Dordrecht, 2002).
14.Giannuzzi, L.A., Stevie, F.A., Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques, and Practice (Springer, New York, 2005).
15.Melngailis, J., J. Vac. Sci. Technol., B 5, 469 (1987).
16.Sigmond, P., Phys. Rev. 184, 383 (1969).
17.Sigmond, P., J. Mater. Sci., 8, 1545 (1973).
18.Ziegler, J.F., Biersack, J.P., Littmark, U., The Stopping Range of Ions in Solids (Pergamon Press, New York, 1984). The SRIM code is available online at www.srim.org (accessed February 2007).
19.Lehrer, C., Frey, L., Petersen, S., Ryssel, H., J. Vac. Sci. Technol., B 19, 2533 (2001).
20.Frey, L., Lehrer, C., Ryssel, H., Appl. Phys. A 76, 1017 (2003).
21.Xu, X., Della Ratta, A.D., Sosonkina, J., Melngailis, J., J. Vac. Sci. Technol., B 10, 2675 (1992).
22.Santamore, D., Edinger, K., Orloff, J., Melngailis, J., J. Vac. Sci. Technol., B 15, 2346 (1997).
23.Kempshall, B.W. et al., J. Vac. Sci. Technol., B 19, 749 (2001).
24.Prenitzer, B.I. et al., Metall. Trans. A 29, 2399 (1998).
25.Ishitani, T., Tsuboi, H., Yaguchi, T., Koike, H., J. Electron Microsc. 43, 322 (1994).
26.Chason, E., Aziz, M.J., Scripta Mater. 49, 953 (2003).
27.Qian, H.X. et al., Appl. Surf. Sci. 240, 140 (2005).
28.Chen, H.H. et al., Science 310, 294 (2005).
29.Castro, M., Cuerno, R., Vázquez, L., Gago, R., Phys. Rev. Lett. 94, 016102 (2005).
30.Volkert, C.A., Lilleodden, E.T., Philos. Mag. 86, 5567 (2006).
31.Marien, J., Plitzko, J., Spolenak, R., Keller, R., Mayer, J., J. Microscopy 194, 71 (1999).
32.Sigle, W., private communication (2002).
33.Volkert, C.A., Busch, S., Heiland, B., Dehm, G., J. Microscopy 214, 208 (2004).
34.Park, C.M., Bain, J.A., J. Appl. Phys. 91, 6380 (2002).
35.Ishitani, T., Kaga, H., J. Electron Microsc. 44, 331 (1995).
36.Carlslaw, H.S., Jaeger, J.C., Conduction of Heat in Solids (Oxford University Press, Oxford, UK, ed. 2, 1959) p. 264.
37.Ishitani, T., Madokoro, Y., Nakagawa, M., Ohya, K., J. Electron Microsc. 51, 207 (2002).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Bulletin
  • ISSN: 0883-7694
  • EISSN: 1938-1425
  • URL: /core/journals/mrs-bulletin
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Altmetric attention score

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed