Skip to main content Accessibility help
×
Home
Hostname: page-component-55597f9d44-l69ms Total loading time: 0.209 Render date: 2022-08-18T04:01:57.835Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "useNewApi": true } hasContentIssue true

Ellipsometry Study on Nanoparticles Grown by Atomic Layer Deposition

Published online by Cambridge University Press:  03 July 2013

Xueqi Zhou
Affiliation:
State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering ,Huazhong University of Science and Technology, Wuhan 430074, China.
Ying Zhang
Affiliation:
State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering ,Huazhong University of Science and Technology, Wuhan 430074, China.
Zhengqiong Dong
Affiliation:
State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China. Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China.
Shiyuan Liu
Affiliation:
State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China. Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China.
Chuanwei Zhang
Affiliation:
State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
Bin Huang
Affiliation:
State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering ,Huazhong University of Science and Technology, Wuhan 430074, China.
Kun Cao
Affiliation:
State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering ,Huazhong University of Science and Technology, Wuhan 430074, China.
Bin Shan
Affiliation:
State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering ,Huazhong University of Science and Technology, Wuhan 430074, China.
Rong Chen*
Affiliation:
State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
*
*Corresponding author: rongchen@mail.hust.edu.cn
Get access

Abstract

Spectroscopic Ellipsometry (SE) was chosen to study thin film growth in atomic layer deposition (ALD). It was shown that Cauchy model had limitations in predicting the ultrathin film thickness at initial few deposition cycles, and the fitting results depend on wavelengths range greatly. Effective Medium Approximation (EMA) model is capable of predicting ultrathin film’s physical properties. Our experiments on Al2O3 growth give supporting evidence on the applicability of EMA model, where it is used to successfully explain the initial nucleation and island like growth. EMA model can be extended to be used for Palladium thin film, which can give reasonable thickness and void content.

Type
Articles
Copyright
Copyright © Materials Research Society 2013 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

George, S. M., Chemical Reviews 110, 111131 (2009).CrossRef
Ott, A. W., Klaus, J. W., Johnson, J. M., and George, S. M., Thin Solid Films 292, 135144 (1997).CrossRef
Puurunen, R. L., Journal of Applied Physics 97, 121301–52 (2005).CrossRef
Kim, H., Lee, H. and Maeng, W. J., Thin Solid Films 517, 25632580 (2009).CrossRef
Knez, M., Nielsch, K. and Niinistö, L., Advanced Materials 19, 34253438 (2007).CrossRef
Gonçalves, D. and Irene, E. A., Química Nova 25, 794800 (2002).CrossRef
Frank, M. M., Chabal, Y. J. and Wilk, G. D., Applied Physics Letters 82, 47584760 (2003).CrossRef
von Keudell, A and Jacob, W., Journal of Applied Physics 79, 10921098 (1996).CrossRef
L. A. S. B. E, Journal of Physics D: Applied Physics 42, 073001 (2009).CrossRef
Jiang, G., Pelcher, D., Kwon, D., Clerico, J., and Collins, G., MRS Online Proceedings Library 782, null-null (2003).
Weber, M. J., Mackus, A. J. M., Verheijen, M. A., van der Marel, C., and Kessels, W. M. M., Chemistry of Materials 24, 29732977 (2012).CrossRef
Campbell, C. T., Surface Science Reports 27, 1111 (1997).CrossRef
Knaut, M., Junige, M., Albert, M., and Bartha, J. W., Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 30, 01A151-9 (2012).CrossRef
Aspnes, D. E., Thin Solid Films 89, 249262 (1982).CrossRef
Zhao, Z. W., Tay, B. K., Lau, S. P., and Xiao, C. Y., Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21, 906910 (2003).CrossRef
Shamala, K. S., Murthy, L. C. S. and Narasimha Rao, K., Materials Science and Engineering: B 106, 269274 (2004).CrossRef
Elam, J. W., Zinovev, A., Han, C. Y., Wang, H. H., Welp, U., Hryn, J. N., and Pellin, M. J., Thin Solid Films 515, 16641673 (2006).CrossRef
Mackus, A. J. M., Verheijen, M. A., Leick, N., Bol, A. A., and Kessels, W. M. M., Chemistry of Materials (2013).

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Ellipsometry Study on Nanoparticles Grown by Atomic Layer Deposition
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Ellipsometry Study on Nanoparticles Grown by Atomic Layer Deposition
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Ellipsometry Study on Nanoparticles Grown by Atomic Layer Deposition
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *