Skip to main content Accessibility help
×
Home
Hostname: page-component-7ccbd9845f-jxkh9 Total loading time: 0.936 Render date: 2023-01-30T16:04:00.378Z Has data issue: true Feature Flags: { "useRatesEcommerce": false } hasContentIssue true

Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique

Published online by Cambridge University Press:  10 February 2011

A.A. Maznev
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
M.J. Banet
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
M. Gostein
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
R.B. Hanselman
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
M.A. Joffe
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
R. Sacco
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
K.A. Nelson
Affiliation:
Dept. of Chemistry, Massachusetts Institute of Technology Cambridge, MA 02139
Get access

Abstract

An all-optical technique based on laser excitation and detection of surface acoustic waves is capable of precise, fast, noncontact and nondestructive measurements of metal film thickness. The technique is integrated into a compact and robust instrument. Applications to metal interconnect process control in integrated circuit technology are presented.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. See e.g. Pramanik, D. and Bothra, S., Future Fab Intl. 1, 183 (1998).Google Scholar
2.Banet, M., Fuchs, M., Belanger, R., Hanselman, J. B., Rogers, J. A., and Nelson, K. A., Future Fab Intl. 4, 297 (1998).Google Scholar
3.Duggal, A.R., Rogers, J.A., and Nelson, K.A., J. Appl. Phys. 72, 2823 (1992).Google Scholar
4.Rogers, J. A., Fuchs, M., Banet, M.J., Hanselman, J. B., Logan, R., and Nelson, K. A., Applied Phys. Letters 71, 225 (1997).Google Scholar
5.Banet, M. J., Fuchs, M., Rogers, J. A., Reinhold, J. H., Knecht, J. M., Rothschild, M., Logan, R., Maznev, A. A., and Nelson, K. A., Applied Physics Letters 73, 169, 13 (1998).Google Scholar
6.Rogers, J.A. and Nelson, K.A., IEEE Trans. Ultrason. Ferroelect.Freq. Control 42, 555 (1995).Google Scholar
7.Kading, O.W., Skurk, H., Maznev, A.A., and Matthias, E., Appl. Phys. A 61, 253 (1995).Google Scholar
8.Rogers, J.A. and Nelson, K.A., J. Adhesion 50, 1 (1995).Google Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *