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MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

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Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique

Published online by Cambridge University Press:  10 February 2011

A.A. Maznev ,
M.J. Banet ,
M. Gostein ,
R.B. Hanselman ,
M.A. Joffe ,
R. Sacco  and
K.A. Nelson
A.A. Maznev
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
M.J. Banet
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
M. Gostein
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
R.B. Hanselman
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
M.A. Joffe
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
R. Sacco
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, alex.maznev@philips.com
K.A. Nelson
Affiliation:
Dept. of Chemistry, Massachusetts Institute of Technology Cambridge, MA 02139
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Abstract

An all-optical technique based on laser excitation and detection of surface acoustic waves is capable of precise, fast, noncontact and nondestructive measurements of metal film thickness. The technique is integrated into a compact and robust instrument. Applications to metal interconnect process control in integrated circuit technology are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 591 , 1999 , 195
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

1. See e.g. Pramanik, D. and Bothra, S., Future Fab Intl. 1, 183 (1998).Google Scholar
2.Banet, M., Fuchs, M., Belanger, R., Hanselman, J. B., Rogers, J. A., and Nelson, K. A., Future Fab Intl. 4, 297 (1998).Google Scholar
3.Duggal, A.R., Rogers, J.A., and Nelson, K.A., J. Appl. Phys. 72, 2823 (1992).Google Scholar
4.Rogers, J. A., Fuchs, M., Banet, M.J., Hanselman, J. B., Logan, R., and Nelson, K. A., Applied Phys. Letters 71, 225 (1997).Google Scholar
5.Banet, M. J., Fuchs, M., Rogers, J. A., Reinhold, J. H., Knecht, J. M., Rothschild, M., Logan, R., Maznev, A. A., and Nelson, K. A., Applied Physics Letters 73, 169, 13 (1998).Google Scholar
6.Rogers, J.A. and Nelson, K.A., IEEE Trans. Ultrason. Ferroelect.Freq. Control 42, 555 (1995).Google Scholar
7.Kading, O.W., Skurk, H., Maznev, A.A., and Matthias, E., Appl. Phys. A 61, 253 (1995).Google Scholar
8.Rogers, J.A. and Nelson, K.A., J. Adhesion 50, 1 (1995).Google Scholar

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