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Adhesion Property of ITO Film on Polymer Treated by Linear Ion Source

Published online by Cambridge University Press:  01 February 2011

Shih Hsiu Hsiao ,
Yoshikazu Tanaka  and
Ari Ide-Ektessabi
Shih Hsiu Hsiao
Affiliation:
shhsiao@t05.mbox.media.kyoto-u.ac.jp, Kyoto University, Mechanical engineering and science, Yoshida-Honmachi, Sakyo-ku, Kyoto, N/A, 606-8317, Japan, 81-75-753-5257, 81-75-753-5259
Yoshikazu Tanaka
Affiliation:
yoshikazu@t04.mbox.media.kyoto-u.ac.jp, Kyoto University, Mechanical Engineering and Science, Yoshida-Honmachi, Sakyo-ku,, Kyoto, N/A, 606-8317, Japan
Ari Ide-Ektessabi
Affiliation:
h51167@sakura.kudpc.kyoto-u.ac.jp, Kyoto University, Mechanical Engineering and Science, Yoshida-Honmachi, Sakyo-ku, Kyoto, N/A, 606-8317, Japan
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Abstract

Indium oxide doped with tin oxide, ITO, has been extensively used as the transparent conductive electrode in display industry, and also been utilized on polymeric substrate for flexible display. The polymeric material used in flexible display has its flexibility and lightweight compared to glass-based substrate. However, it does not completely meet with the requirements in mechanical properties. The ion irradiations modify the polymeric surface that can be expected to improve its adhesion property. In this study, linear ion source was developed to treat the polymeric surface, and then ITO thin film was deposited by sputter deposition commonly utilized in display industry. Atomic Force Microscope was used to analyze the physical transformation of surface structure after the various argon and oxygen ion irradiated. Finally, the scratch testing showed the adhesive strength improved between ITO thin film and polymeric substrate when surface modified by optimum ion irradiation. Moreover, linear ion source provides the good uniformity of surface treatment and is very suitable for production-scale process.

Keywords

adhesionion-beam processingpolymer
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 936: Symposium L – Materials for Next-Generation Display Systems , 2006 , 0936-L05-27
Copyright
Copyright © Materials Research Society 2006

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