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Alternative Catalysts For Si-Technology Compatible Growth Of Si Nanowires

  • Francesca Iacopi (a1), Philippe M Vereecken (a2), Marc Schaekers (a3), Matty Caymax (a4), Nele Moelans (a5), Bart Blanpain (a6), Christophe Detavernier (a7), Jan D'Haen (a8) and Hefin Griffiths (a9)...
Abstract

The use of Au nanoparticles as catalysts for growth of Si nanowires poses fundamental reliability concerns for applications in Si semiconductor technology. In this work we show that the choice of catalysts can be broadened when the need for catalytic precursor dissociation is eliminated. However, the requirements for selective deposition in a gas phase transport -limited regime become stringent. When competing deposition of amorphous Si can bury the particles faster than the incubation time for VLS growth, no nanowire growth will be initiated. We show that the use of a catalyst such as In, already in a liquid form at the growth temperature, is effective. Therefore, the choice of VLS catalysts among the low melting point metals from the III, IV and V groups is suggested.

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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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