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An Approach to High Quality a-Ge:H by VHF Deposition

Published online by Cambridge University Press:  01 January 1993

Ralf Zedlitz ,
Moritz Heintze  and
Gottfried H. Bauer
Ralf Zedlitz
Affiliation:
Institut für Physikalische Elektronik, Universität Stuttgart, Pfaffenwaldring 47, D-7000 Stuttgart 80, F.R.Germany
Moritz Heintze
Affiliation:
Institut für Physikalische Elektronik, Universität Stuttgart, Pfaffenwaldring 47, D-7000 Stuttgart 80, F.R.Germany
Gottfried H. Bauer
Affiliation:
Institut für Physikalische Elektronik, Universität Stuttgart, Pfaffenwaldring 47, D-7000 Stuttgart 80, F.R.Germany
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Abstract

Amorphous hydrogenated germanium a-Ge:H was deposited by very high frequency glow discharge (VHF-GD) at frequencies between 25 and 220MHz, low pressure (2.5Pa) and high deposition rates (≤4Á /s) on both electrodes of a parallel plate reactor. The films are comparable to material deposited on the powered electrode of a conventional RF-GD. Mobility-lifetime products ηµτ for photogenerated charge carriers around 10-7cm2/V and a Fermi level position at EC-EF≈400meV indicate good opto-electronic properties. The IR spectra show that the samples are free of oxydization and incorporate slightly more voids than the RF material. Measurements of ion energy Ei and flux Фi in the substrate plane show that “hard&” preparation conditions are obtained comparable to the deposition on the powered electrode of an RF-GD.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 297: Symposium A – Amorphous Silicon Technology - 1993 , 1993 , 55
Copyright
Copyright © Materials Research Society 1993

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References

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