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The As-Grown Microtopologies of Modified-Lely SiC(0001) Terraced Vicinal Surfaces

Published online by Cambridge University Press:  15 February 2011

T. Marek ,
J. Heindl ,
H.P. Strunk ,
R. Eckstein ,
St.G. Müller  and
D. Hofmann
T. Marek
Affiliation:
Universität Erlangen-Nürnberg, Institut für Werkstoffwissenschaften, Lehrstuhl für Mikrocharakterisierung, Cauerstr.6
J. Heindl
Affiliation:
Universität Erlangen-Nürnberg, Institut für Werkstoffwissenschaften, Lehrstuhl für Mikrocharakterisierung, Cauerstr.6
H.P. Strunk
Affiliation:
Universität Erlangen-Nürnberg, Institut für Werkstoffwissenschaften, Lehrstuhl für Mikrocharakterisierung, Cauerstr.6
R. Eckstein
Affiliation:
Lehrstuhl für Werkstoffe der Elektrotechnik, Martensstr.7, D-91058 Erlangen Germany.
St.G. Müller
Affiliation:
Lehrstuhl für Werkstoffe der Elektrotechnik, Martensstr.7, D-91058 Erlangen Germany.
D. Hofmann
Affiliation:
Lehrstuhl für Werkstoffe der Elektrotechnik, Martensstr.7, D-91058 Erlangen Germany.
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Abstract

Risers and treads on terraced surfaces of modified-Lely (M-Lely) grown 6H-SiC(0001) bulk crystals are investigated by reflection electron microscopy (REM). On risers we find parallel steps, with a height of one or two unit cells. On treads we find in addition to growth spirals island formation. We take these observations to conclude that two competitive processes operate in parallel, the step-flow mode and the two-dimensional nucleation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 440: Symposia CA – Structure and Evolution of Surfaces , 1996 , 145
Copyright
Copyright © Materials Research Society 1997

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References

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