A series of atom probe and transmission electron microscopy (TEM) studies have been performed to quantify minute compositional fluctuations in Fe55Pt45 thin films during the A1 to L10 phase transformation. The atom probe specimens were analyzed in an Imago Local Electrode Atom Probe (LEAP®) at a target evaporation of 0.5%, a pulse fraction of 20% and a temperature of 120K. We noted a propensity of fracture failures in the LEAP with this material at lower temperatures. The atom probe reconstruction showed small levels of Pt segregation at grain boundaries in the as-deposited films. Fresnel-contrast TEM imaging confirmed high density fluctuations in these boundaries. Upon annealing at 600°C for 10 minutes, the film transformed from A1 to L10 and the grain boundaries become Fe enriched as compared to the as-deposited film.
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