Skip to main content
×
×
Home

Biochemical IC Chips Fabricated by Hybrid Microstereolithography

  • Koji Ikuta (a1), Shoji Maruo (a1), Tadahiro Hasegawa (a1), Takao Adachi (a1), Atsushi Takahashi (a1) and Kota Ikeda (a1)...
Abstract
ABSTRACT

The world's first microstereolithography named “IH process” was developed by Ikuta et al. in 1992. Several types of micro stereo lithography including Hybrid-IH process, Super-IH process and Two-photon IH process, have been also developed. Three-dimensional (3D) resolution has reached to 140 nm in the two-photon IH process. The super-IH process and the two-photon process enable direct writing of movable micromechanisms without assembling process or sacrificial layer technique. The hybrid-IH process provides various types of composite devices with other functional elements such as actuators and sensors. These IH processes can be widely used for making polymeric microdevices. We have applied these techniques to create new micro chemical device named “Biochemical IC Chip” proposed by Ikuta et al. in 1994. IH process enables to make the biochemical IC chip including real 3D micro fluidic channels. Various kinds of Biochemical IC chip such as micro pumps, switching valves, reactors, concentrators, have already been fabricated. In chip cell-free protein synthesis has been demonstrated by using biochemical IC chips. The biochemical IC chips will open new bioscience and medicine based on innovative technology. In this paper, we introduce several types of IH process and its application to biochemical IC chips.

Copyright
References
Hide All
1. Ikuta K. and Hirowatari K., Proc. of IEEE International Workshop on Micro Electro Mechanical System (MEMS 93), 4247 (1993).
2. Ikuta K., Ogata T., Tsuboi M., Kojima S., Proc. of MEMS 96, pp. 301306 (1996).
3. Ikuta K., Maruo S., Fujisawa T., Yamada A., Proc. of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS 99), pp. 376381 (1999).
4. Ikuta K., Hasegawa T., Adachi T. and Maruo S., Proc. of MEMS 2000, pp. 739744 (2000).
5. Maruo S. and Ikuta K., Proc. of MEMS 2001, 151154 (2001).
6. Takagi T. and Nakajima N., Proc. of MEMS 93, 173178 (1993).
7. Bertsch A., Zissi S., Jezequel J. Y., Corbel S. and Andre J. C., Microsystem Technologies 3, 4247 (1997).
8. Ikuta K., Maruo S. and Kojima S., Proc. of MEMS 98, 290295 (1998).
9. Maruo S. and Ikuta K., Applied Physics Letters 76, 26562658 (2000).
10. Maruo S. and Ikuta K., Sensors and Actuators A 100, 7076 (2002).
11. Maruo S., Nakamura O. and Kawata S., Optics Letters 22, 132134 (1997).
12. Maruo S. and Kawata S., Journal of Microelectromechanical Systems 7, 411415 (1998).
13. Maruo S. and Ikuta K., Proc. of 10th International Conference on Solid-State Sensors and Actuators (Transducers 99), 12321235 (1999).
14. Maruo S., Ikuta K. and Korogi H., Proc. of SPIE 3937, 106112 (2000).
15. Maruo S. and Ikuta K., Proc. of MEMS 2001, 594597 (2001).
16. Cumpston B. H., Ananthavel S. P., Barlow S., Dyer D. L., Ehrlich J. E., Erskine L. L., Heikal A. A., Kuebler S. M., Lee I. -Y. S., McCord-Maughon D., Qin J., Reckel H., Rumi M., Wu X., Marder S. R. and Perry J. W., Nature 398, 5154 (1999).
17. Kawata S., Sun H. B., Tanaka T., and Takada K., Nature 412, 697698 (2001).
18. Maruo S., Ikuta K. and Korogi H., Proc. of the IEEE Conference on Nanotechnology (IEEE-NANO 2001), 507512 (2001).
19. Maruo S., Ikuta K. and Korogi H., Proc. of Micro Total Analysis Systems 2002 (μ-TAS 2002), 937939 (2002).
20. Ikuta K., Hirowatari K. and Ogata T., Proc. of MEMS 94, 16 (1994).
21. Ikuta K., Maruo S., Fukaya Y. and Fujisawa T., Proc. of MEMS 98, 131136 (1998).
22. Ikuta K., Sasaki Y., Maegawa H., Maruo S. and Hasegawa T., Proc. of μ-TAS 2002, 745747 (2002).
23. Ikuta K., Takahashi A. and Maruo S., Proc. of MEMS 2001, 455458 (2001).
24. Ikuta K., Takahashi A., Ikeda K. and Maruo S., Proc. of μ-TAS 2002, 3739 (2002).
25. Wise K.D. and Najafi K., Science 254, 13351342 (1991).
26. Galajda P. and Ormos P., Appl. Phys. Lett. 78, 249251 (2001).
27. Ikuta K., Proc. of Artificial Life V, 1724 (1996).
28. Hasegawa T. and Ikuta K., Proc. of μ-TAS 2001, 377378 (2001).
29. Hasegawa T. and Ikuta K., Proc. of μ-TAS 2002, 694696 (2002).
30. Ikuta K., Hasegawa T. and Adachi T., Proc. of Transducers 01, 916919 (2001).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 5 *
Loading metrics...

Abstract views

Total abstract views: 65 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 25th February 2018. This data will be updated every 24 hours.