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Characterization of BaTiO3 Thin Films Deposited by Pulsed-Laser Ablation

Published online by Cambridge University Press:  26 February 2011

Christopher Scarfone ,
M. Grant Norton ,
C. Barry Carter ,
Jian Li  and
James W. Mayer
Christopher Scarfone
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
M. Grant Norton
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
C. Barry Carter
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
Jian Li
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
James W. Mayer
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
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Abstract

Thin films of barium titanate (BaTiOs) have been deposited by pulsed-laser ablation onto (001)-oriented MgO substrates. The films were epitactic as evidenced by both x-ray diffraction and ion-channeling techniques. The film surface appeared smooth and contained a low density of particulates. This latter feature is believed to be due to the formation of target pellets having a very high density.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 183
Copyright
Copyright © Materials Research Society 1991

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