Hostname: page-component-8448b6f56d-sxzjt Total loading time: 0 Render date: 2024-04-25T00:43:38.892Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterization of Interfacial Roughness in Semiconductor Heterostructures by X-Ray Reflectivity

Published online by Cambridge University Press:  25 February 2011

A. Krol ,
C. J. Sher ,
H. Resat ,
S. C. Woronick ,
W. Ng ,
Y. H. Kao ,
L. L. Chang  and
J. M. Hong
A. Krol
Affiliation:
Department of Physics, State University of New York at Stony Brook, Stony Brook, NY 11794
C. J. Sher
Affiliation:
Department of Physics, State University of New York at Stony Brook, Stony Brook, NY 11794
H. Resat
Affiliation:
Department of Physics, State University of New York at Stony Brook, Stony Brook, NY 11794
S. C. Woronick
Affiliation:
Department of Physics, State University of New York at Stony Brook, Stony Brook, NY 11794
W. Ng
Affiliation:
Department of Physics, State University of New York at Stony Brook, Stony Brook, NY 11794
Y. H. Kao
Affiliation:
Department of Physics, State University of New York at Stony Brook, Stony Brook, NY 11794
L. L. Chang
Affiliation:
IBM Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598
J. M. Hong
Affiliation:
IBM Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598
Get access

Abstract

The reflection of monochromatic x-rays by a layered heterostructure can be utilized as a nondestructive probe to obtain information on the interfacial roughness in the material. Interference between x-rays reflected from the top surface and the interfaces can give rise to pronounced oscillations in the reflectivity as a function of the grazing incidence angle. We have made use of this technique to investigate the interfacial roughness in semiconductor heterostructures grown by molecular beam epitaxy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 103 , 1987 , 355
Copyright
Copyright © Materials Research Society 1988

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Woronick, S.C., Yang, B.X., Krol, A., Kao, Y.H., Munekata, H., Chang, L.L. and Phillips, J.C., Proc. III International Conf. Modulated Semiconductor Structures, Montpellier, France (1987).Google Scholar
2.Vidal, B. and Vincent, P., Appl. Opt. 23, 1794 (1984).Google Scholar
3.Krol, A., Sher, C.J., and Kao, Y.H., to be published.Google Scholar
4.Beckmann, P. and Spizzichino, A., The Scattering of Electromagnetic Waves from Rough Surfaces (Pergamon Press, New York, 1963).Google Scholar