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Characterization of Plasma Immersion Deposited Multilayer Coatings by Ion Beam Techniques Combined with Energy Filtered Transmission Electron Microscopy

Published online by Cambridge University Press:  26 February 2011

Florian Schwarz ,
Joerg K. N. Lindner ,
Maik Häeberlen ,
Goetz Thorwarth ,
Claus Hammerl ,
Walter Assmann ,
Marcus Kuhn  and
Bernd Stritzker
Florian Schwarz
Affiliation:
florian.schwarz@physik.uni-augsburg.de, Universitaet Augsburg, Institut fuer Physik, Germany
Joerg K. N. Lindner
Affiliation:
joerg.lindner@physik.uni-augsburg.de, Universitaet Augsburg, Institut fuer Physik, Germany
Maik Häeberlen
Affiliation:
maik.haeberlen@physik.uni-augsburg.de, Universitaet Augsburg, Institut fuer Physik, Germany
Goetz Thorwarth
Affiliation:
goetz.thorwarth@physik.uni-augsburg.de, Universitaet Augsburg, Institut fuer Physik, Germany
Claus Hammerl
Affiliation:
hammerl@axyntec.de, AxynTeC Duennschichttechnik GmbH, Germany
Walter Assmann
Affiliation:
walter.assmann@physik.uni-muenchen.de, Beschleunigerlaboratorium/MLL der LMU und TU Muenchen, Germany
Marcus Kuhn
Affiliation:
kuhn@axyntec.de, AxynTeC Duennschichttechnik GmbH, Germany
Bernd Stritzker
Affiliation:
stritzker@physik.uni-augsburg.de, Universitaet Augsburg, Institut fuer Physik, Germany
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Abstract

Multilayered and nanostructured coatings of amorphous carbon (DLC), silicon composite multilayers and nanocluster containing films today have great potential for applications as hard coatings, wear reduction layers and as diffusion barriers in biomaterials. Plasma immersion ion implantation and deposition (PIII&D) is a powerful technique to synthesize such films. The quantitative nanoscale analysis of the elemental distribution in such multielemental films and thin film stacks however is demanding.

In this paper it is shown how the high spatial resolution capabilities of energy filtered trans-mission electron microscopy (EFTEM) chemical analysis can be combined with accurate and standard-less concentration determination of ion beam analysis (IBA) techniques like Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) to achieve absolute and accurate multielement concentration profiles in complicated nanomaterials.

Keywords

nanostructuretransmission electron microscopy (TEM)ion beam analysis
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 908: Symposium OO – Growth, Modification, and Analysis by Ion Beams at the Nanoscale , 2005 , 0908-OO14-01
Copyright
Copyright © Materials Research Society 2006

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References

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