Skip to main content

A Comparative Study of MOCVD Produced ZnO Films Doped with N, As, P and Sb

  • Gary S. Tompa (a1), S. Sun (a2), C. E. Rice (a3), L. G. Provost (a4) and D. Mentel (a5)...

ZnO thin films are of interest for an array of applications; including: light emitters, photovoltaics, sensors and transparent contacts among others. Of particular interest is the potential to produce p-type layers from which p-n junction devices could be routinely produced. While it is fairly routine for MOCVD to produce n-type films with doping concentrations in the 10E20 cm-3 range and resistivities below 10E-3 ohm-cm; it is very difficult to produce measurable p-type ZnO. We report on our efforts with doping films p-type using N gas sources and metalorganic sources of P, As, and Sb. Films showing acceptor bands by photoluminescence have been demonstrated; however reliable electrical measurements remain difficult. Specific problems include achieving low resistance ohmic contacts, accounting for the photo-responsiveness of ZnO films and sensitivity limits in Hall measurements of low-doped and compensated materials. The presentation will review deposition parameters, produced and processed films and material characteristics.

Hide All
1. Look D.C., Mater. Sci. and Eng. B80, 383 (2001).
2. Minegishi , Koiwai Y., Kikuchi Y., Yano K., Kasuga M. and Shimizu R., Jpn. J. Appl. Phys., 36, L1453 (1997).
3. Xiong G. et al, Appl. Phys. Lett. 80, 1195 (2002); K. H. Bang et al, Appl. Surf. Sci. 210, 177 (2003); A. V. Singh et al, J. Appl. Phys. 93, 396 (2003); J. Huang et al, J. Mater. Sci. Lett. 22, 249 (2003); K-K. Kim et al, Appl. Phys. Lett. 83, 63 (2003); J. Lu et al, Mater. Lett. 57, 3311 (2003); D-K Hwang et al, J. Crystal Growth 254, 449 (2003); C-C. Lin et al, Appl. Phys. Lett. 84, 5040 (2004); F. Zhuge et al, Appl. Phys. Lett. 87, 092103 (2004); E. Kamińska et al, Phys. Stat. Sol. C. 2, 1119 (2005); Y. Nakano et al, Appl. Phys. Lett. 88, 172103 (2006).
4. Joseph M. et al, Jpn. J. Appl. Phys. 38, L1205 (1999); Y. R. Ryu et al, J. Crystal Growth 216, 330 (2000); M. Joseph et al, Physica B 302-303, 140 (2001); X-L Guo, et al, J. Crystal Growth 223, 135 (2001), and Optical Materials 19, 229 (2002); 1V. Vaithianathan et al, J. Appl. Phys. 98, 043519 (2005), Appl. Phys. Lett. 86, 062101 (2005), and J. Cryst. Growth 287, 85 (2006); J. G. Lu et al, Appl. Phys. Lett. 88, 222114 (2006); N. Xu et al, J. Vac. Sci. Technol. A. 24, 517 (2006).
5. Ashrafi A. B. M. A. et al, Jpn. J. Appl. Phys. 41, L1281 (2002); D. C. Look et al, Appl. Phys. Lett. 81 (10), 1830-1832 (2002); 1F. X. Xiu et al, Appl. Phys. Lett. 87, 152101 (2005); H. W. Liang et al, Phys. Stat. Sol. A 202, 1060 (2005); F. X. Xiu et al, Appl. Phys. Lett. 88, 052106 (2006); E. Przeździecka et al, Phys. Stat. Sol. C 3, 988 (2006).
6. 1C.Rice E. et al, Materials Research Society Symp. Proc. 764, C3.10.1 (2003). X. Li et al, J. Vac. Sci. Technol. A 21, 1342 (2003), and Electrochem. and Solid State Lett. 6, C56 (2003); J. Wang et al, J. Cryst. Growth 255, 293 (2003); S. Sun et al, J. Electron. Materials 35, 766 (2006); I. Volintiru et al, Appl. Phys. Lett. 89, 022110 (2006).
7. Tompa G. S., Provost L. G., and Cuchiaro J. D., Proc. MRS Workshop on Transparent Conducting Oxides, June 2000.
8. Forsythe E. W., Gao Y., and Tompa G. S., J. Vacuum Sci. Technol. A17 (1999) 1761.
9. Rice C.E., Tompa G.S., Provost L.G., Sbrockey N., and Cuchiaro J., Materials Research Soc. Proc., San Francisco CA, paper C3-10 (2003).
10. Sbrockey N. M., Cuchiaro J. D., Hoerman B. H., Provost L. G., Rice C. E., Sun S., Tompa G. S., Ganesan S., Nause J. and Nemeth W. B., III-Vs Review, 17(7), 23 (2004).
11. 1
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *



Full text views

Total number of HTML views: 0
Total number of PDF views: 3 *
Loading metrics...

Abstract views

Total abstract views: 58 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 18th March 2018. This data will be updated every 24 hours.