Skip to main content

Comparison of Low Temperature Methods for the Production of Silicon Dioxide Thin Films.

  • Stephen D. Baker (a1), W. I. Milne (a1) and S. Taylor (a2)

In this paper we present a comparison of the physical and electrical properties of high quality insulating thin films of silicon dioxide produced at low temperatures by three methods; standard plasma enhanced CVD of silane/nitrous oxide, photo enhanced CVD of silane/nitrous oxide using a novel internal nitrogen discharge lamp, and oxygen plasma anodisation.

The electrical and interface properties of the films, obtained from current-voltage and capacitance-voltage measurements are compared. The physical properties and composition of the films have been investigated by standard methods such as ellipsometry and p-etch rate, and spectroscopic techniques such as Auger, XPS, LIMA and Infrared absorption. The results of these investigations are reported.

The effects of low temperature annealing on the film properties have been examined and the suitability of each of the fabrication techniques to a variety of applications is discussed.

Hide All
[1] Luo, F-C., Pultorak, D. & Freeman, E., IEEE Trans. El. Devices, FD–30, 202 (1983).
[2] Eagle, D.J., PhD Thesis, Cambridge University, 1986.
[3] Pliskin, W.A., J. Vac. Sci. Tech. 14, 1064 (1977).
[4] Thanh, L. Do, Exner, V. & Balk, P., in Proceedings of INFOS ′87, Leuven, Belgium, April 1987.
[5] Hu, S.M., J. Vac. Sci. Tech., 14, 1 (1977).
[6] Taylor, S., Barlow, K.J., Eccleston, W. & Kiermasz, A., IEE Electronics Lett. 23, 7 (1987).
[7] Adams, A.C., Alexander, F.B., Capio, C.D. & Smith, T.E., J. Electrochem. Soc., 128, 1545 (1981).
[8] Tarui, Y., Hidaka, J. & Aota, K., Jap. J. Appl. Phys., 23, L827 (1981).
[9] Robertson, P.A. & Milne, W.I., in Proceedings of the MRS Fall Meeting, Boston, December 1986.
[10] Pavelescu, C., Cobianu, C., Condruic, L. & Segal, E., Thin Solid Films, 114, 291 (1984).
[11] Baker, S.D., Clay, K.J., Clough, F.J., Milne, W.I. & Taylor, S., in Proceedings of E-MRS Meeting, Strasbourg, April 1987.
[12] Batey, J. & Tierney, E., J. Appl. Phys., 60, 3136 (1986).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 2 *
Loading metrics...

Abstract views

Total abstract views: 36 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 22nd April 2018. This data will be updated every 24 hours.