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Comprehensive Mechanical and Tribological Characterization of Ultra-Thin-Films

  • Norm Gitis (a1), Michael Vinogradov (a2), Ilja Hermann (a3) and Suresh Kuiry (a4)

Based on recent studies, mechanical and tribological properties such as hardness, Young's modulus, friction, and scratch adhesion strength on various coatings and ultra-thin films are reported. These results were obtained using a Universal Nano+Micro Tester UNMT-1, suitably designed for comprehensive evaluation of mechanical and tribological properties of bulk materials, coatings and thin films. Results indicate that a substrate effect for ultra-thin films is substantial when using conventional static nanoindentation technique, while negligible with an advanced dynamic nano-indentation. Comparative results of hardness and Young's modulus obtained from various techniques are presented. Also, a means to evaluate friction and adhesion strength of thin films is highlighted, using DLC specimens as an example.

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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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