Skip to main content
×
×
Home

Crystallographic Orientation in Bulk Polycrystalline Silicon Carbide Produced by a Chemical Vapor Deposition (CVD) Process

  • James V. Marzik (a1) and William J. Croft (a2)
Abstract

Polycrystalline, theoretically dense silicon carbide was deposited onto graphite substrates via the reductive pyrolysis of methyltrichlorosilane in a hot-walled chemical vapor deposition (CVD) chamber. The resulting product can be considered a bulk material with deposit thicknesses in the range of 4 to 8 millimeters. The material was characterized using powder x-ray diffraction and Laue back-reflection techniques. Under the deposition conditions investigated in this study, the crystallographic orientation varied as a function of distance from the substrate. The material exhibited a high degree of randomness in proximity to the substrate, and progressively showed a higher degree of preferred crystallographic orientation as the deposit progressed. This phenomenon is correlated with the microstructure of the material as well as such mechanical properties as hardness and fracture toughness.

Copyright
References
Hide All
1 URL: www.performancematerial.com/cvd_sic/cvd_sic_prop.htm for a summary of properties of the CVD silicon carbide used in this study
2 Sullivan, T.M., III-Vs Review, Vol. 12 (5), 34 (1999)
3 PerformanceSiCTM manufactured by Performance Materials, Inc., Hudson, NH.
4 1998 Annual Book of ASTM Standards, Vol 15.01, Standard C1327-96a
5 Evans, A.G. and Charles, E.A., J. Amer. Ceram. Soc., 59, 371 (1976).
6 Bloss, F. Donald, Crystallography and Crystal Chemistry (Mineralogical Society of America,Washington D.C., 1994), p. 338.
7 Goela, J.S. and Taylor, R.L., Proceedings of the SPIE Conference on Window and Dome Technologies and Materials IV, Vol. 2286, 46 (1994).
8 Goela, J.S., Burns, L.E., and Taylor, R.L., Appl. Phys. Lett. 64, 131 (1994).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 3 *
Loading metrics...

Abstract views

Total abstract views: 58 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 24th May 2018. This data will be updated every 24 hours.