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The Decomposition of Methyltrichlorosilane in Hydrogen and Helium

Published online by Cambridge University Press:  15 February 2011

Thomas H. Osterheld  and
Mark D. Allendorf
Thomas H. Osterheld
Affiliation:
Sandia National Laboratories, Mail Stop 9052 Livermore, CA 94551-0969
Mark D. Allendorf
Affiliation:
Sandia National Laboratories, Mail Stop 9052 Livermore, CA 94551-0969
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Abstract

Experimental measurements of the decomposition of methyltrichlorosilane (MTS), a common silicon carbide precursor, in a high-temperature flow reactor are presented. Methane, hydrogen chloride, and silicon tetrachloride are observed as products of the decomposition. Trapping experiments with acetylene and ethylene also detected SiCl3 as a decomposition product. Upper limits on the concentrations of any CH3Cl, HSiCl3, H2SiCl2, or H2C=SiCl2 which might form are provided. Quantitative measurements of product branching and MTS decomposition rates are presented. The results suggest a radical-chain mechanism for the decomposition in hydrogen but not in helium.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 363 , 1994 , 27
Copyright
Copyright © Materials Research Society 1995

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Footnotes

*

Work supported by the Advanced Industrial Materials Program of the U.S. Dept. of Energy Office of Industrial Technologies.

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