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Effects of High D.C. Hias Voltage on the Properties of Diamond-Like Carbon Films

Published online by Cambridge University Press:  01 February 2011

Boqian Yang ,
Hongxin Zhang ,
Xinpeng Wang  and
Xianping Feng
Boqian Yang
Affiliation:
nanoupr@yahoo.com, Univ. of Puerto Rico, Physics department, Apt1502,Torre del Norte, Ave.Universidad#4, Rio Piedras, San Juan, 00925, Puerto Rico, 787-764-0000ext.7671
Hongxin Zhang
Affiliation:
zhanghongxin727@yahoo.com, University of Puerto Rico, Physics department, San Juan, 00931, Puerto Rico
Xinpeng Wang
Affiliation:
david160108@hotmail.com, University of Puerto Rico, Physics department, San Juan, 00931, Puerto Rico
Xianping Feng
Affiliation:
pfeng@cnnet.upr.edu, University of Puerto Rico, Physics department, San Juan, 00931, Puerto Rico
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Abstract

Diamond-like carbon (DLC) films were synthesized using pulsed plasma sputtering deposition techniques. Microscope and Raman scattering techniques were used to study the effects of bias voltages on the properties of diamond-like carbon films. With d.c. bias voltage up to 1000V, the smooth and thick DLC films together with a few nanoparticles were obtained. An increase of the d.c. bias voltage up to 2000V yielded thicker DLC films but its surface became slightly rough and size of particles became large. The crystalline properties of these particles were studied. A tiny diamond peak from Raman spectrum was also observed.

Keywords

diamondsputteringthin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 956: Symposium J – Diamond Electronics—Fundamentals to Applications , 2006 , 0956-J09-01
Copyright
Copyright © Materials Research Society 2007

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References

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