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Electrical and Optical Properties of LiNbO3/CaCu3Ti4O12 Heterostructures on Si

  • Javad R. Gatabi (a1), Kevin A. Lyon (a2), Shafiqur Rahman (a1), Hanu Arava (a2), Juan S Rojas-Ramirez (a3), R. K. Pandey (a3) and Ravi Droopad (a1) (a3)...

The role of ferroelectric LiNbO3 (LNB) in altering the frequency dependence of the capacitance of CaCu3Ti4O12 (CCTO) thin films has been investigated. A cost effective spin coating deposition process was used to integrate the oxide heterostructures onto silicon substrates. This study showed that the frequency stability of the CCTO/LNB structure was much improved when the crystallization conditions and physical dimension of each layer were optimized. To integrate this structure with current silicon technology, heterostructures of CCTO and LNB thin films were fabricated on HF terminated Si using chemical solution deposition. It was found that the order of deposition of the two layers was important for the structural quality of the heterostructures with the CCTO layer followed by the LNB layer being the preferred structure. In addition to improvement of the capacitance variation with frequency, the heterostructures also provide a path to tuning the frequency of operation.

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1. Nishida, T., Echizen, M., Gun, B., Kono, T.; Tsuchikawa, T., Uchiyama, K., Shiosaki, T., ISAF 2007. 16th IEEE International Symposium, pp. 193, 194, 27–31, 2007.
2. Victor, A., Nath, J., Ghosh, D., Boyette, B., Maria, J.-P., Steer, M.B., Kingon, Angus I., Stauf, Gregory T., Radio and Wireless Conference, 2004 IEEE, pp. 91, 94, 19–22, 2004.
3. Yulan, Zhang, Kalkur, T. S., Progress In Electromagnetics Research Symposium Proceedings, Marrakesh, Morocco, 20–23, 2011.
4. Feng, Z., Fathelbab, W.M., Lam, P.G., Haridasan, V., Maria, J.-P., Kingon, , Angus, I., Steer, M.B., Microwave Symposium, IEEE MTT-S International, pp. 1061, 1064, 7–12, 2009.
5. Kim, K.B., Yun, T.S., Lee, J.C., Chaker, M., Park, C.S., Wu, K.,, Electronics Letters, Vol. 43, No. 14, 2007.
6. Pan, K.C.; Jiang, H.; Brown, D.; Zhang, C.H.; Patterson, M.; Subramanyam, G., Proceedings of the 2011 IEEE National, pp. 1, 4, 20–22, 2011.
7. Scheele, P., Goelden, F., Giere, A., Mueller, S., Jakoby, R., Microwave Symposium Digest, 2005 IEEE MTT-S International, pp. 4, 12-17, 2005.
8. Boser, O., Newsome, V., Components, Hybrids, and Manufacturing Technology, IEEE Transactions, Vol. 10, No. 3, pp. 437, 439, 1987.
9. Pandey, R. K., Stapleton, W.A, Tate, J., Bandyopadhyay, A.K., Sutanto, I., Sprissler, S., Lin, S., AIP Advances 3, 062126, 2013.
10. Li, F., Balazs, M.K., and , S.; Journal of the Electrochemical Society, 2005, Vol. 152, No. 8, pp. G669G673.
11. Simoes, A.Z., Zaghete, M.A., Stojanovic, B.D., Gonzalez, A.H., Riccardi, C.S., Cantoni, M., Varela, J.A.; Journal of the European Ceramic Society, Vol. 24, No. 6, 2004, pp. 16071613.
12. Chen, X.M., Journal of Materials Science, 1996, No. 7, pp. 5154.
13. Joshi, V., Roy, D., Mecartney, M.L., Applied Physics Letters, 1993, Vol. 63, No. 10, pp. 13311331.
14. Viswanathan, S. Saji, Han Cheol Choe, Bulletin of Materials Science, 2010, Vol. 33, No. 3, pp. 203207.
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  • EISSN: 1946-4274
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