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Electron-Phonon and Phonon-Phonon Interactions Under Laser Annealing Conditions

  • Alvin Compaan (a1)
Abstract

Since the first time-resolved Raman studies of pulsed laser annealing (PLA) effects in Si, a number of cw Raman studies have been performed which provide a much improved basis for understanding the consequences on Raman spectra of temperature-dependent resonance effects, high carrier density effects, phonon anharmonicity, and strain effects. Here we briefly review these effects and then analyze the latest pulsed Raman studies of PLA including Stokes/anti-Stokes ratios, the shift and shape of the first order line, and time-resolved second-order spectra. The Raman data indicate the existence of a Raman-silent phase followed by a rapidly cooling solid which begins within 300 K of the normal melting temperature of Si. The Raman data also give evidence of carrier densities in the recrystallizing solid of ~1−2×l019/cm3 .

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1. Heine, V. and Van Vechten, J. A., Phys. Rev. B 13, 1622 (1976); J. Bok, Phys. Lett. 84A, 448 (1981).
2. Van Vechten, J. A. in Semiconductor Processes Probed by Ultrafast Spectroscopy, edited by Alfano, R. R. (Academic, NY, 1983).
3. Van Vechten, J. A., J. Phys. (Paris) 44, C511 (1983).
4. Preston, J. S. and Van Driel, H. M., Phys. Rev. B 30, 1950 (1984).
5. Shank, C. V., Yen, R., Hirliman, C., Phys. Rev. Lett. 50, 454 (1983); Hulin, D., Combescot, M., Bok, J., Migus, A., Vinet, J. Y., and Antonetti, A., Phys. Rev. Lett. 52, 1998 (1984).
6. Larsen, B. C., White, C. W., Noggle, T. S., Barhurst, J. F. and Mills, D. M., Mat. Res. Soc. Symp. Proc. 13, 43 (1983).
7. Liu, J. M., Yen, R., Kurz, H. and Bloembergen, N., Appl. Phys. Lett. 39, 7551 (1981); Bensoussan, M. and Moisson, J. M., Physica 117B and 118B, 404 (1983); Pospieszczyk, A., Abdel Harith, M. and Stritzker, B., J. Appl. Phys. 54, 3176 (1983).
8. Lo, H. W. and Compaan, A., Phys. Rev. Lett. 44, 1604 (1980).
9. von der Linde, D. and Wartman, G., Appl. Phys. Lett. 41, 700 (1982); von der Linde, D., Wartman, G., and Ozols, A., Mat. Res. Soc. Symp. Proc. 13, (1983); Wartman, G., von der Linde, D., and Compaan, A., Appl. Phys. Lett. 43, 613 (1983).
10. Compaan, A., Mat. Res. Soc. Symp. Proc. 13, 23 (1983); Compaan, A., Lo, H. W., Lee, M. C. and Aydinli, A., Phys. Rev. B 26, 1079 (1982).
11. Wartmann, G., Kemmler, M. and von der Linde, D., Phys. Rev. B 30, 4850 (1984).
12. Compaan, A., in Proc. 3rd Trieste IUPAP Semiconductor Symposium "High Excitation and Short Pulse Phenomena# July 2–4, 1984, [J. Luminescence (in print)].
13. Tsu, R. and Hernandez, J. G., Appl. Phys. Lett. 41, 1016 (1982)
14. Balkanski, M., Wallis, R. F. and , E. Haro, Phys. Rev. B 28, 1928 (1983).
15. Nemanich, R. J., Biegelson, D. K., Street, R. A. and Fennell, L. E., Phys. Rev. B 29, 605 (1984).
16. See for example, Balkanski, M., Jain, K. P., Beserman, R. and Jouanne, M., Phys. Rev. B 12, 4328 (1975) and Chandrasekhar, M., Renucci, J. B. and Cardona, M., Phys. Rev. B 4, 1623 (1978).
17. Compaan, A., Contreras, G., Cardona, M. and Axmann, A., J. Phys. (Paris) 44, C5–197 (1983); A. Compaan, G. Contreras and M. Cardona, Mat. Res. Soc. Symp. Proc. 23, 117 (1984); G. Contreras, A. K. Sood, M. Cardona A. Compaan, Sol. St. Commun. 49, 303 (1984).
18. Sood, A. K. and Cardona, M., Sol. St. Commun. 49, 306 (1984).
19. Compaan, A. and Trodahl, H. J., Phys. Rev. B 29 793 (1984).
20. Battacharya, A., Streetman, B. G. and Hess, K., J. Appl. Phys. 53, 1261 (1982); Lee, M. C., Aydinli, A., Lo, H. W. and Compaan, A., J. Appl. Phys. 53, 1262 (1982).
21. , Landoldt-Bornstein, New Series Gp. III, Vol. 7a ed. by Madelung, O., Schulz, M. and Weiss, H. (Springer, Berlin, 1982).
22. Dziewior, J. and Schmid, W., Appl. Phys. Lett. 31, 346 (1977); Svantessen, K. G. and Nilsson, N. G., Sol. St. Electron, 21, 1603 (1978).
23. Jellison, G. E. and Modine, F. A., Phys. Rev. B 27,7466 (1983); Aspnes, D. E. and Studna, A. A., Phys. Rev. B 27, 985 (1983).
24. Vina, L. and Cardona, M., Phys. Rev. B 29, 6739(1984).
25. The effects on Raman spectra of compressive stress resulting from laser heating have been discussed by Lo, H. W. and Compaan, A. [J. Appl. Phys. 1565 (1980)] and analyzed in detail by Jellison, G. E., Wood, Jr. and R. F. [Mat. Res. Symp. Proc. 23, 153 (1984)]. We find the stress-induced phonon frequency shifts to be approximately ¼ as large as calculated by Jellison and Wood. The difference probably arises from a numerical error in the original stress experiments of Anastassakis, et al. [Anastassakis, E., Pinczuk, A., Burstein, E., Pollak, F. H., and Cardona, M., Sol. St. Commun. 8, 133 (1970)].
26. Temple, P. A. and Hathaway, C. E., Phys. Rev. B 7, 3685 (1973).
27. Narayan, J., Fletcher, J., White, C. W. and Christie, H., J. Appl. Phys. 52, 7121 (1981); Jellison, G. E., , Jr., Lowndes, D. H., and Wood, R. F., Mat. Res. Soc. Symp. Proc. 13, 35 (1983).
28. Wood, R. F., Rasolt, M. and Jellison, G. E., , Jr., Mat. Res. Soc. Symp. Proc. 4, 61 (1982).
29. Wood, R. F., Lowndes, D. H., Jellison, G. E., Modine, Jr. and F. A., Appl. Phys. Lett. 41, 287 (1982).
30. Compaan, A., Lee, M. C., Lo, H. W., Trott, G. J. and Aydinli, A., J. Appl. Phys. 54, 5950 (1983).
31. Lee, M. C., Trott, G. J. and Compaan, A. (unpublished).
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