Skip to main content Accessibility help
×
×
Home

Establishing a Quantitative Relationship Between Harmonic Signals and Damage in Interconnects

  • Qingzhe Wen (a1) and David R. Clarke (a1)

Abstract

When a metal conductor is driven by an AC current of frequency ω, its resistance will vary at a frequency 2ω, and a third harmonic voltage will be generated. If the conductor is also under a DC bias, a second harmonic voltage will arise as well. The magnitude of these harmonic voltages increases with damage because of nonlinear increases in the resistance caused by localized Joule heating. We use the harmonic technique to evaluate the damage in metal lines. The correlation between deliberately introduced defects of different sizes and the amplitude of the harmonic voltages has been studied experimentally. The harmonic technique shows higher damage sensitivity than the commonly used resistance method. Additionally, it has a better rejection to noise and resistance drifting.

Copyright

References

Hide All
1. d'Heurle, F. M. and Ho, P. S., in Thin Films – Interdiffusion and Reactions, Wiley-Interscience Publication, New York, 243(1978)
2. Chen, T. M. and Yassine, A. M., IEEE Transactions on Electron Devices, 41 (11), 2165 (1994)
3. Jones, B. K. and Xu, Y. Z., Rev. Sci. Instrum. 66 (9), 4676 (1995)
4. Arzt, E., Kraft, O., Nix, W. D., and Sanchez, J. E. Jr, J. Appl. Phys., 76 (3), 1563 (1994)
5. Besser, P. R., Marieb, T. N., and Bravman, J. C., Mat. Res. Soc. Symp. Proc., Vol. 309, 181 (1993)
6. Cahill, D. G. and Pohl, R. O., Phys. Rev. B, 35 (8), 4067 (1987)
7. Carslaw, H. S. and Jaeger, J. C., Conduction of Heat in Solids, Oxford University Press, Oxford, 1959
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed