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Fabrication of CMOS Compatible Sub-micron Nails for On-chip Phagocytosis

  • Roeland Huys (a1), Carmen Bartic (a1), Bart Van Meerbergen (a1), Dries Braeken (a1), Josine Loo (a1), Kurt Winters (a1), Chang Chen (a1), S. Yitzchaik (a2), M. Spira (a3), J. Shappir (a4) and Gustaaf Borghs (a1)...

Neuronal research requires to efficiently perform long-time experiments on large-scale neuronal networks in a minimally invasive way. Such experiments imply stimulation and measurements of electrical activity on a large number of neurons. This could be achieved by on-chip integration of actuators, sensors and readout electronics with dimensions comparable to the sizes of neurons. Integration of biosensors at this scale creates new challenges: the processing of the sensors must be compatible with state-of-the art CMOS technology, the system must be biocompatible, and the down-scaled technology imposes restrictions on the applicable stimulation voltages and increases the electrical noise.

Recently it has been demonstrated that biological phenomena can be exploited in order to achieve the best coupling between cells and sub-micron scale electronics. Engulfment of sub-micron nail structures by the cell membrane minimizes the distance between the sensor and the cell [1], [2].

This paper presents two methods to produce nails with sizes from sub-micrometer to micrometer scales, on top of a CMOS chip. Prototype chips have been fabricated, and cells have been cultured to examine the in-vitro bio-compatibility of the chip.

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1.Spira M. E., Kamber D., Dormann A., et al., “Improved neuronal adhesion to the surface of electronic device by engulfment of protruding micro-nails fabricated on the chip surface”, submitted to MRS Spring meeting 2007.
2.Meerbergen B. Van et al., “Improving neuronal adhesion on chip using a phagocytosis-like event”, Journal of Experimental Nanoscience, 2, 101114, 2007
3.Bergveld P., Wiersma J., Meertens H., “Extracellular potential recordings by means of a field effect transistor without gate metal, called OSFET,” IEEE Trans. Biomed. Eng., vol. 23, no. 2, pp. 136144, March 1976.
4.Fromherz P., Offenhaeuser A., Vetter T. et al., “A neuron-silicon junction: a Retzius cell of the leech on an insulated-gate field-effect transistor,” Science, vol. 252, no. 5010, pp. 12901293, May 1991.
5.Eversmann B., Jenkner M., Hofmann F. et al., “A 128×128 CMOS biosensor array for extracellular recording of neural activity”, IEEE J. Solid-State Circ., vol. 38, no. 12, 23062317, 2003.
6.Frey U., Heer F., Pedron R. et al., “An 11k-Electrode 126-Channel High-Density Microelectrode Array to Interact with Electrogenic Cells”, Proc. IEEE ISSCC, pp. 158159, February 2007.
7.Ulbrich M. H. and Fromherz P., “Opening of K+ channels by capacitive stimulation from silicon chip”, Appl. Phys. A vol. 81, pp. 887891, 2005.
8.Schätzthauer R. and Fromherz P., “Neuron-silicon junction with voltage-gated ionic currents”, European Journal of Neuroscience, vol. 10, no. 619561962, 1998.
9.Sun Y. and Xia Y., “Mechanistic Study on the Replacement Reaction between Silver Nanostructures and Chloroauric Acid in Aqueous Medium”, Journal of American Chemical Society, vol. 126, 38923901, 2004.
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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