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Fabrication of Sol-Gel Derived Ferroelectric Plzt (9/65/35) Optical Waveguides

Published online by Cambridge University Press:  25 February 2011

P.F. Baude ,
C. Ye ,
T. Tamagawa  and
D.L. Polla
P.F. Baude
Affiliation:
Dept. of Electrical Engineering University of MN Minneapolis, Mn 55455
C. Ye
Affiliation:
Dept. of Electrical Engineering University of MN Minneapolis, Mn 55455
T. Tamagawa
Affiliation:
Dept. of Electrical Engineering University of MN Minneapolis, Mn 55455
D.L. Polla
Affiliation:
Dept. of Electrical Engineering University of MN Minneapolis, Mn 55455
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Abstract

Crack free transparent ferroelectric PLZT (9/65/35) thin films were deposited on silicon substrates using the sol-gel deposition technique. An intermediate layer of PLT was used to improve the PLZT's optical quality and to reduce the amount of film cracking. Wet chemical, plasma and reactive ion etching are investigated as means of realizing the necessary waveguide structures. Waveguiding is observed in 2-4mm long PLZT (9/65/35) fabricated by reactive ion beam etching.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 275
Copyright
Copyright © Materials Research Society 1992

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