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Hillock formation and thermal stresses in thin Au films on Si substrates

  • Linda Sauter (a1), T. John Balk (a2), Gerhard Dehm (a3), Julie A. Nucci (a1) and Eduard Arzt (a1)...

Abstract

The wafer curvature technique was used to analyze stresses in fine-grained, 50 nm to 2 μm thick Au films on silicon substrates between room temperature and 500°C. The microstructural evolution was analyzed by scanning electron microscopy (SEM), focused ion beam (FIB) microscopy and transmission electron microscopy (TEM). In situ heating experiments inside a scanning electron microscope provided a comparison between the morphological development and the stress-temperature behavior of the film. Hillock formation was observed, but it can only partially account for the stress relaxation measured by the wafer curvature technique.

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1. Hieber, H., Thin Solid Films 37 (3), 335 (1976).
2. Kim, J. Y. and Hummel, R. E., Physica Status Solidi A 122 (1), 255 (1990).
3. Miller, D. C., Herrmann, C. F., Maier, H. J., George, S. M., Stoldt, C. R., and Gall, K., Scripta Materialia 52, 873 (2005).
4. Pennebaker, W. B., Journal of Applied Physics 40 (1), 394 (1969).
5. Zhang, Yanhang, Dunn, M. L., Gall, K., Elam, J. W., and George, S. M., Journal of Applied Physics 95 (12), 8216 (2004).
6. Nix, W. D., Metall. Trans. A 20A, 2217–45 (1989).
7. Kim, K., Heiland, B., Nix, W. D., Arzt, E., M.Deal, D., and Plummer, J. D., Thin Solid Films 371 (1-2), 278 (2000).
8. Kim, D. K., Nix, W. D., Deal, M. D., and Plummer, J. D., Journal of Materials Research 15 (8), 1709 (2000).
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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