Skip to main content

In Situ Observation of an Electrochemical Etching Reaction in Silicon

  • Frances M. Ross (a1) and Peter C. Searson (a2)

We describe a TEM specimen holder which has been designed and constructed in order to observe the process of electrochemical pore formation in silicon. The holder incorporates electrical feedthroughs and a sealed reservoir for the electrolyte and it accepts lithographically patterned silicon specimens. We present ex situ observations of progressive pore propagation and show dynamic, in situ observations of electrolyte movement within the pores.

Hide All
1. Canham, L. T., Appl. Phys. Lett. 57, 1046 (1990)
2. Theunissen, M. J., J. Electrochem. Soc. 119, 351 (1972)
3. Chuang, S.-F., Collins, S. D. and Smith, R. L., Appl. Phys. Lett. 55, 154 and 675 (1989)
4. Lehmann, V. and Föll, H., J. Electrochem. Soc. 137, 653 (1990)
5. Smith, R. L. and Collins, S. D., J. Appl. Phys. 71, R1 (1992)
6. Searson, P. C., Macaulay, J. M. and Ross, F. M., J. Appl. Phys. 72, 253 (1992)
7. Lehmann, V., J. Electrochem. Soc. 140, 2836 (1993)
8. Krumme, J.-P. and Straumanis, M. E., Trans. Met. Soc. AIME 239, 396 (1967)
9. Chase, B. D. and Holt, D. B., J. Electrochem. Soc. 119, 314 (1972)
10. Faktor, M. M., Fiddyment, D. G. and Taylor, M.R., J. Electrochem. Soc. 122, 1566 (1975)
11. Ross, F. M., Oskam, G., Searson, P. C., Macaulay, J. M. and Liddle, J. A., submitted to Phil. Mag. A (1995)
12. Munder, H., Berger, M. G., Frohnhoff, S., Thönissen, M. and Lüth, H., Lumin, J.. 57, 5 (1993)
13. Berger, M. G., Thönissen, M., Arens-Fischer, R., Münder, H., Lüth, H., Arntzen, M. and Theiss, W., Thin Solid Films 255, 313 (1995)
14. Searson, P. C., Appl. Phys. Lett. 59, 832 (1991)
15. Tsao, S. S., Guilinger, T.R., Kelly, M.J. and Clews, P.J., J. Electrochem. Soc. 136, 586 (1989)
16. Beale, M. I. J., Chew, N. G., Uren, M. J., Cullis, A. G. and Benjamin, J. D., Appl. Phys. Lett. 46, 86 (1985)
17. Beale, M. I. J., Benjamin, J. D., Uren, M. J., Chew, N. G. and Cullis, A. G., J. Cryst. Growth 73, 622 (1985)
18. Smith, R. L., Chuang, S.-F. and Collins, S. D., J. Electronic Materials 17, 533 (1988)
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 2 *
Loading metrics...

Abstract views

Total abstract views: 45 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 15th August 2018. This data will be updated every 24 hours.