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Investigation of Structural and Mechanical Properties of Laser Deposited Microlaminate Hard Coatings

Published online by Cambridge University Press:  17 March 2011

Manoj Radder ,
A.K. Sikder  and
Ashok Kumar
Manoj Radder
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL
A.K. Sikder
Affiliation:
Center for Microelectronics Research, University of South Florida, Tampa, FL
Ashok Kumar
Affiliation:
Center for Microelectronics Research, University of South Florida, Tampa, FL Also with Department of Mechanical Engineering, University of South Florida
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Abstract

Nitride and carbide are superhard material with a high potential for applications in different fields. A new group of coatings are the multilayered/microlaminate coatings, which have shown very interesting properties. Single and microlaminate films were coated on Silicon (Si) substrates using pulsed laser deposition (PLD) technique. Films were deposited at different substrate temperatures in order to study the microstructure evolution and their effect on the mechanical properties of these microlaminate films. Structure of the films was characterized by x-ray diffraction (XRD) technique. Surface morphology and roughness of the films were investigated using atomic force microscopy (AFM). Hardness and modulus of the films were investigated using nanoindentation technique. It has been demonstrated that using boron carbide as a bottom layer increases the hardness and Young's modulus values of carbide composite coatings. Microlaminates of boron carbide/titanium carbides have shown higher hardness and modulus as compared to the microlaminates of nitride coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 697: Symposium P – Surface Engineering 2001--Fundamentals and Applications , January 2001 , P8.7
Copyright
Copyright © Materials Research Society 2002

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