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Laser Vaporization and Deposition of Lead Zirconate Titanate

  • Peter K. Schenck (a1), Lawrence P. Cook (a1), Jianrong Zhao (a2), John W. Hastie (a1), Edward N. Farabaugh (a1), Chwan-Kang Chiang (a1), Mark D. Vaudin (a1) and Philip S. Brody (a3)...


Laser-induced vaporization of ceramics shows promise as a technique for the deposition of thin films of these materials. Critical to the utility of this technique is an understanding of the laser-material interaction, plume formation and dynamics, material transport and how variations in the vaporization conditions affect the deposited film. Lead zirconate titanate (PZT, Zr/Ti-47/53) targets were irradiated using a q-switched Nd:YAG laser (15 ns, 100 mJ at 1.064 /μm) . The deposition chamber was maintained at a pressure of 100 mTorr oxygen. Material from the plume was collected on silicon wafer substrates, suspended 1.0 - 3.0 cm above the target. The films were characterized by SEM/EDX, TEM, x-ray diffraction and electrical measurements before and after annealing. Very thin films were deposited on carbon coated metal grids for observation in the TEM using a hot stage to study crystallization. Temporally and spatially resolved spectra of the light emitted by the laser-generated plume were obtained with an optical multichannel analyzer (0MA) to yield information on the plume generation and chemistry of the deposition process. These spectra indicate that under these conditions a plasma is created above the target surface which persists for -100 ns after the laser pulse.



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1 Krehl, P., Schwirke, F. and Cooper, A.W., “Correlation of Stress-Wave Profiles and the Dynamics of the Plasma Produced by Laser Irradiation of Plane Solid Targets”, J. Appi. Phys., 46 [10], 44004406 (1975).
2 Shen, G. and Yeung, E.S., “A Spatial and Temporal Probe for Laser-Generated Plumes Based on Density Gradients”, Anal. Chem., 60 [9], 864868 (1988).
3 Schenck, P.K., Bonnell, D.W., and Hastie, J.W., “Insitu Analysis of Laser-Induced Vapor Plumes”, Am. Vac. Soc, Proc. Joint Int. Laser Science and Am. Vac. Soc. Conf., Atlanta, October, 1988 (in Press).
4 Cook, L. P., Schenck, P. K., Zhao, J., Farabaugh, E. N., and Chiang, C. K., “Ceramic Thin Films by Laser Deposition”, to be published in Proc. Symp. on Ceramic Thin and Thick Films, April, 1989, ACerS.
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  • EISSN: 1946-4274
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