Hostname: page-component-76fb5796d-x4r87 Total loading time: 0 Render date: 2024-04-25T17:47:32.152Z Has data issue: false hasContentIssue false
  • English
  • Français

Mass Spectrometric Thermal Evolution of Novel Indium Metalorganic Precursors for MOCVD

Published online by Cambridge University Press:  22 February 2011

G. Bruno ,
P. Capezzuto ,
G. Cicala ,
M. Losurdo ,
G. Rossetto ,
M. Porchia  and
P. Zanella
G. Bruno
Affiliation:
Centro Studio Chimica Plasmi CNR, via G.Amendola, 173–70126 Bari (Italy)
P. Capezzuto
Affiliation:
Centro Studio Chimica Plasmi CNR, via G.Amendola, 173–70126 Bari (Italy)
G. Cicala
Affiliation:
Centro Studio Chimica Plasmi CNR, via G.Amendola, 173–70126 Bari (Italy)
M. Losurdo
Affiliation:
Centro Studio Chimica Plasmi CNR, via G.Amendola, 173–70126 Bari (Italy)
G. Rossetto
Affiliation:
CNR-Istituto Chimica Tecnologia Materiali, Corso Stati Uniti, 35100 Padua (Italy)
M. Porchia
Affiliation:
CNR-Istituto Chimica Tecnologia Materiali, Corso Stati Uniti, 35100 Padua (Italy)
P. Zanella
Affiliation:
CNR-Istituto Chimica Tecnologia Materiali, Corso Stati Uniti, 35100 Padua (Italy)
Get access

Abstract

The thermal behaviour of dialkylindium-dialkylamides R2InNR/2 (R,R'=Me, Et) and dialkylindium-azolides R2lnNR' (NR'=Pyrrole, Pyrazole) has been examined by a mass spectrometric thermal evolution technique, in the temperature range 30–400°C. Data on volatility, identity of gasified molecules, threshold temperature and products of the decomposition processes are reported and discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 282: Symposium E – Chemical Perspectives of Microelectronic Materials III , 1992 , 69
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Zanella, P., Rossetto, G., Brianese, N., Ossola, F., Porchia, M., Chem. of Materials 3, 225 (1991).Google Scholar
2. Aitchison, K.A., Backer-Dirks, J.D.J., Bradley, D.C., Faktor, M.M., Frigo, D.M., Hursthouse, M.B., Hussain, B., Short, R.L., J.Organom. Chem. 366, 11 (1989).Google Scholar
3. Porchia, M., Benetollo, F., Brianese, N., Rossetto, G., Zanella, P., J. Qganom. Chem 424, 1 (1992).Google Scholar
4. Rossetto, G., Ajò, D., Brianese, N., Casellato, U., Ossola, F., Porchia, M., Vittadini, A., Zanella, P., Graziani, R., Inorg. Chim. Acta 170, 95 (1990).Google Scholar
5. McCaulley, J.A., McCrary, V.R., Donnely, V.M., J. Phys. Chem. 93 (3), 1148 (1989).Google Scholar
6. Locke, K., Schob, F., Bouanoh, N., Brianese, N., Zanella, P., Gao, Y., J. Organom. Chem. 420, 1 (1991).Google Scholar