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Micromachined SFM Probes for High-Frequency Electric and Magnetic Fields

Published online by Cambridge University Press:  10 February 2011

D. W. Van Der Weide ,
V. Agrawal ,
P. Neuzil  and
T. Bork
D. W. Van Der Weide
Affiliation:
Department of ECE, University of Delaware, Newark, DE 19716–3130, dan@ee.udel.edu
V. Agrawal
Affiliation:
Department of ECE, University of Delaware, Newark, DE 19716–3130, dan@ee.udel.edu
P. Neuzil
Affiliation:
Ginzton Laboratory, Stanford University, Stanford, CA 94305
T. Bork
Affiliation:
Department of ECE, University of Delaware, Newark, DE 19716–3130, dan@ee.udel.edu
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Abstract

We discuss micromachined localized high-frequency electric (coaxial) and magnetic (loop) field probes integrated with scanning force microscopes. Our approach enables simultaneous acquisition of both field and topography in the radio frequency (RF) through millimeter-wave regime, enabling more complete characterization of materials, devices and circuits.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 500: Symposium EE – Electrically Based Microstructural Characterization II , 1997 , 21
Copyright
Copyright © Materials Research Society 1998

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References

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