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Micron Sized Arm Using Reversible TiNi Alloy Thin Film Actuators

Published online by Cambridge University Press:  15 February 2011

Katutoshi Kuribayashi
Affiliation:
Faculty of Engineering, University of Yamaguchi, Tokiwadai, Ube, Yamaguchi. 755Japan
Takao Taniguchi
Affiliation:
Faculty of Engineering, University of Yamaguchi, Tokiwadai, Ube, Yamaguchi. 755Japan
Masaaki Yositake
Affiliation:
Osaka Prefectural Research Institute, Econojima, Nishiku, Osaka, 550Japan
Sooichi Ogawa
Affiliation:
Osaka Prefectural Research Institute, Econojima, Nishiku, Osaka, 550Japan
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Abstract

Reversible TiNi (= RTiNi) alloy thin film actuator has many advantages for micro sized robot. That is. a micro arm could be fabricated easily on silicon wafer because RTiNi alloy thin film has 3 functions. 1) a frame of the arm, 2) a joint of the arm and 3) an actuator of the arm. and moreover, this film could actuates the arm without friction. A micron sized flexible arm using RTiNi alloy thin film was designed on silicon wafer. IC process for fabricating this arm on silicon wafer was designed. The fabricating process for this arm and its heat treatment process for the RTiNi are presented.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

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