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Modeling of Pyrolytic Laser-Assisted Chemical Vapor Deposition: Effects of Kinetics and Choice Of Substrate

Published online by Cambridge University Press:  26 February 2011

D.C. Skouby  and
K.F. Jensen
D.C. Skouby
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
K.F. Jensen
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
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Abstract

The pyrolytlc laser-assisted deposition of metals Is modeled. A finite element approach is used to solve for temperatures and gas-phase concentrations In a transient calculation. The model accommodates the use of temperature-dependent physical properties as well as the occurrence of irregularly shaped deposits. Volcano-like deposits’ are predicted under certain conditions of gas pressure and laser intensity. The effect of using substrates with different thermal conductivities is investigated. Using adsorption-desorption kinetics such that the reaction rates have sharp maxima with respect to temperature, volcanoes of varying depths are modeled.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 107
Copyright
Copyright © Materials Research Society 1998

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References

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