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Near-Field Ultrasonic Imaging: A Novel Method for Nondestructive Mechanical Imaging of IC Interconnect Structures

  • G. S. Shekhawat (a1), H. Xie (a1), Y. Zheng (a1) and R. E. Geer (a1)

The investigation of an alternate approach to nondestructive, nanoscale mechanical imaging for IC interconnect structures is reported. This approach utilizes a heterodyne interferometer based on a scanning probe microscope, also referred to as heterodyne force microscopy (HFM). This interferometer is sensitive to the relative phase difference of the two ultrasonic excitations due to spatial variations in the sample viscoelastic response and enables near-field, phase-sensitive imaging. Proof-of-feasibility demonstrations of this technique are presented for ultrasonic phase-imaging of Al/low-k interconnect structures. Spatial resolution <10 nm is demonstrated.

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[1] Briggs G. A. D., Acoustic Microscopy, (Clarendon Press, Oxford, 1992) p. 28.
[2] Maivald P., Butt H. J., Gould S. A. C., Prater C. B., Drake B., Gurley J.A., Elings V. B., and Hansma P. K.Nanotechnology 2 103 (1991).
[3] Rabe U. and Arnold W., Appl. Phys. Lett. 64 1423 (1994).
[4] Kolosov O. V., Yamanaka K., Jpn. J. Appl. Phys. 32 1095 (1993).
[5] Cuberes M. T., Assender H. E., Briggs G. A. D. and Kolosov O. V., J. Phys. D: Appl. Phys. 33 2347 (2000).
[6] Dinelli F., Castell M. R., Ritchies D. A., Mason N. J., Briggs G. A. D., and Kolosov O. V., Philosophical Magazine A80 2299 (2000).
[7] Geer R. E., Kolosov O.V., Briggs G.A.D., and Shekhawat G. S., J. of Appl. Phys., in press.
[8] Vitale S. A., Chae H., and Sawin H. H., J. Vac. Sci. Technol. A18 2770 (2000).
[9] Gundlach Heidi, Talevi Robert, Bian Zailong, Nuesca Guillermo, Sankaran Sujatha, Kumar Kaushik, Kaloyeros Alain E., Geer Robert E., Liu Joyce, Hummel John, Shaffer Edward O. and Martin Steven J., J. Vac. Sci. Technol., B18 2463 (2000).
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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