Skip to main content

Non-Destructive and Whole Wafer Characterization of III-V Infrared Epitaxial Materials Prepared by Turbo Disk Metalorganic Chemical Vapor Deposition

  • Z. C. Feng (a1), M. Pelczynski (a1), C. Beckham (a1), P. Cooke (a1), I. Ferguson (a1) and R. A. Stall (a1)...

Multiple wafer growth of infrared III-V semiconductor materials of InSb and InGaAsP have been produced by metalorganic chemical vapor deposition technology employing a vertical reactor growth configuration with a high speed rotating disk. Three measurement techniques of sheet resistivity, Fourier transform infrared (FTIR) reflectance and photoluminescence have been used to characterize epitaxial films on wafers up to 4″ diameter. Mapping distributions of the film thickness, sheet resistivity, surface morphology, and PL peak wavelength with uniformities better than 1% are illustrated. Data from our 2900 runs are produced. Variations of the characteristic features of the film with the growth conditions are discussed. These whole wafer and non-destructive material characterization techniques tightly coupled with the epitaxial processes are necessary to realize the high quality and high uniformity growth of state-of-art materials in a production environment.

Hide All
1. Manasreh M. O., Myers T. H. and Julien F. H. ed., Infrared Applications of Semiconductors-Materials, Processing and Devices, Mat. Res. Soc. Symp. Proc. Vol.450, Materials Research Society (1997).
2. Razeghi M. ed., Long Wavelength Infrared Detectors, in book series of Optoelectronic Properties of Semiconductors and Superlattices, Vol. 1, series ed. Mansreh M. O., Gordon & Breach Press (1996).
3. Turner G. W., Choi H. K., Manfra M. J. and Connors M. K., in [1], p. 3.
4. Razeghi M., Diaz J., Yi H.J., Wu D., Lane B., Rybaltowski A., Xiao Y., Jeon H., in [1], p. 13.
5. Holmes D. E. and Kamath G. S., J. Electron. Mater. 9, 95 (1980).
6. McKee M. A., Norris P. E., Stall R. A., Tompa G. S., Chem C. S., Noh N., Kang S. S. and Jasinski T. J., J. Crystal Growth 107, 445 (1991).
7. McKee M. A., Yoo B.-S. and Stall R. A., J. Crystal Growth 124, 286 (1992).
8. Thompson A.G., Stall R.A., Gurary A.I. and Ferguson I., Inst. Phys. Conf. Ser. No. 155, 881 (1996).
9. Feng Z. C., Beckham C., Schumaker P., Ferguson I., Stall R. A., Schumaker N., Povloski M. and Whitley A., in Infrared Applications of Semiconductors – Materials, Processing, and Devices, Mat. Res. Soc. Symp. Proc. Vol.450, ed. Julien F., Myers T. and Manasreh M., MRS, Pittsburgh, pp. 6166 (1997).
10. Ferguson I., Tran C.A., Karlicek R.F., Feng Z.C., Stall R.A., Laing S., Cai W., Li Y., Liu Y. and Lu Y., in Photodetectors: Materials and Devices II, Proceedings of SPIE, Vol.2999, ed. Brown G.J. & Razeghi M., pp. 298305 (1997).
11. Woelk E., Jurgensen H., Rolph R. and Zielinski T., J. Electron. Mater. 24, 1715 (1995).
12. Yoo B.-S., McKee M. A., Kim S.-G. and Lee E.-H., Solid State Commun. 88, 447 (1993).
13. Li K., Wee A.T.S., Lin J., Tan K.L., Zhou L., Li S.F.Y., Feng Z C., Chou H.C., Kamra S. & Rohatgi A., J. Materials Science: Materials in Electronics 8, 125132 (1997).
14. Nelson A.W., Spurdens P.C., Cole S., Walling R.H., Wong S., Harding M.J., Cooper D.M., Devlin W.J. and Robertson M. J., J. Crystal Growth 93, 792 (1988).
15. McKee M.A., Yoo B.-S. and Stall R.A., Proc. 4th Intl. Conf. On InP and Related Materials, p.151 (1992).
16. Mori K., Takemi M., Takiguchi T., Goto K., Nishimura T., Kimura T., Mihashi Y. and Murotani T., Proc. 5th Intl. Conf. On InP and Related Materials, p.235 (1993).
17. Jordan A.S., J. Electron. Mat. 24, 1649 (1995).
18. Lum R.M., McDonald M.L., Mack E.M., Williams M.D., Storz F.G. and Levkoff J., J. Electron. Mat. 24, 1577 (1995).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 1 *
Loading metrics...

Abstract views

Total abstract views: 41 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 14th December 2017. This data will be updated every 24 hours.