Photoluminescence measurements have been made on Eu-doped CaF2 thin films grown on Si(100) substrates. The dependence of the integrated intensity of both the zero-phonon line and the vibronic sideband on temperature and Eu concentration has been studied in the range of 10 – 300 K and 0.14 – 7.48 at. %, respectively. An anti-Stokes feature is visible in the emission spectra at 75 K, indicating a significant occupation of the excited vibrational states of Eu2+ by phonons before the transition at temperatures above 75 K. The integrated intensity of the vibronic sideband increases slightly as temperature increases. The solubility of Eu in CaF2 thin films grown on Si(100) is found to be somewhere around 4.05 at. % as confirmed by the increase of the line width of x-ray rocking curves and the decrease in the integrated intensity of the zero-phonon line with Eu concentration.
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