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Optical Properties of RF-Sputtered a-SiGe:H:O Alloys

  • J. M. T. Pereira (a1), P. K. Banerjee (a1) and S. S. Mitra (a1)
Abstract
ABSTRACT

Amorphous thin films of SixGe1-x:O (x = 0.70) were prepared by RF-sputtering at several substrate temperatures. The structural properties of these films were studied by IR spectroscopy and revealed features characteristic of hydrogen and/or oxygen bonded to silicon. The optical constants (n,k) were determined from reflection and transmission measurements at near-normal incidence for photon energies in the range of 1 eV and 2.6 eV. The optical gap was derived from the Taue plot and correlated with the composition of the samples. The increase of hydrogen and/or oxygen decreases the value of the refractive index and increases the optical gap.

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1) Chevallier J., Wieder H., Onton A., Guarnieri C. R., Solid State Commun. 24, 867 (1977)
2) Weisz S. Z., Goldstein Y., Gomez M., Muir J. A., Resto O., Perez R., Thin Solid Films 119, 59 (1984)
3) Paul W., Paul D. K., von Roedern B., Blake J., Oguz S., Phys. Rev. Lett. 46, 1016 (1981)
4) Mackenzie K. D., Eggert J. R., Leopold D. J., Li Y. M., Lin S., Paul W., Phys. Rev. B 31, 2198 (1985)
5) Saito N., Aoki K., Sannomiya H., Yamaguchi T., Thin Solid Films, 253 (1984)
6) Lucovsky G., Rudder R. A., Cook J. W. Jr, Lin S. Y., in Mat. Res. Soc. Symp. Proc. 49, 135 (1985)
7) Dong N. V., Danh T. H., Leny J. Y., J. Appl. Phys. 52, 338 (1981)
8) Hauschildt D., Fisher R., Fuhs W., Phys. Status Solidi B 102, 563 (1980)
9) Nakamura G., Sato K., Ishihara T., Usui M., Okaniwa K., Yukimoto Y., J. Non-Cryst. Solids 59/60, 1111 (1983)
10) Bullot J., Galin M., Gauthier M., Bourdon B., J. Phys. (Paris) 44, 713 (1983)
11) Chahed L., Senemaud C., Theye M. L., Bullot J., Galin M., Gauthier M., Bourdon B., Toulemonde M., Solid State Commun. 45, 649 (1983)
12) Nozawa K., Yamaguchi Y., Hanna J., Shimizu I., J. Non-Cryst. Solids 59/60, 533 (1983)
13) Itozaki H., Fujita N., Hitotsuyanagi H., in Mat. Res. Soc. Symp. Proc. 49, 161 (1985)
14) Banerjee P. K., Dutta R., Mitra S. S., Paul D.K., J. Non-Cryst. Solids 50, 1 (1982)
15) Beaglehole D., Zavetova M., J. Non-Cryst. Solids 4, 272 (1970)
16) Slobodin D., Aljishi S., Schwarz R., Wagner S., in Mat. Res. Soc. Symp. Proc. 49, 153 (1985)
17) Ovshinsky S. R., Adler D., in Mat. Res. Soc. Symp. Proc. 49, 251 (1985)
18) Paesler M. A., Anderson D. A., Freeman E. C., Moddel G., Paul W., Phys. Rev. Lett. 41, 1492 (1978)
19) Knights J. C., Street R. A., Lucovsky G., J.Non-Cryst. Solids 35/36, 279 (1980)
20) Anderson D. A., Moddel G., Paesler M. A., Paul W., J. Vac. Sci. Technol. 16, 906 (1979)
21) Lucovsky G., Chao S. S., Yang J., Tyler J. E., Ross R.C., Czubatyj W., Phys. Rev. B 31, 2190 (1985)
22) Yacobi B.G., Collins R. W., Moddel G., Viktorovitch P., Paul W., Phys. Rev. B 24, 5907 (1981)
23) Shimizu T., Kumeda M., Watanabe I., Kamono K., J. Non-Cryst. Solids 35/36, 303 (1980)
24) Imura T., Ushita K., Hiraki A., Jpn. J. Appl. Phys. 19, L65 (1980)
25) Lucovsky G., Yang J., Chao S. S., Tyler J. E., Czubatyj W., Phys. Rev. B 28, 3225 (1983)
26) Freeman E. C., Paul W., Phys. Rev. B 18, 4288 (1978)
27) Paulick T.C, Appl. Optics 25, 562 (1986)
28) Brodsky M. H., Title R. S., Weiser K., Pettit G. D., Phys. Rev. B 1, 2632 (1970)
29) Cody G. D., Wronski C. R., Abeles B., Stephens R. B., Brooks B., Solar Cells 2, 227 (1980)
30) Weiser G., Ewald D., Milleville M., J.Non-Cryst. Solids 35/36, 447 (1980)
31) Taue J., Grigorovici R., Vancu A., Phys. Stat. Sol. 15, 627 (1966)
32) Freeman E. C, Paul W., Phys. Rev. B 20, 716 (1979)
33) Jeffrey F. R., Shanks H. R., Danielson G. C., J. Non-Cryst. Solids 35/36, 261 (1980)
34) Connell G. A. N., Pawlik J. R., Phys. Rev. B 13, 787 (1976)
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