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A Picowatt Energy Harvester

Published online by Cambridge University Press:  20 January 2011

Joe Evans ,
Johannes Smits ,
Carl Montross  and
Gerald Salazar
Joe Evans
Affiliation:
Radiant Technologies, Inc., 2835D Pan American Fwy NE, Albuquerque, NM 87107 USA
Johannes Smits
Affiliation:
Scaldix B V Stationsstraat 13 4331 JA Middelburg, The Netherlands
Carl Montross
Affiliation:
Radiant Technologies, Inc., 2835D Pan American Fwy NE, Albuquerque, NM 87107 USA
Gerald Salazar
Affiliation:
Radiant Technologies, Inc., 2835D Pan American Fwy NE, Albuquerque, NM 87107 USA
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Abstract

The authors describe an energy harvester circuit fabricated with integrated thin ferroelectric film capacitors on a silicon substrate. The harvesting mechanism is a folded double-beam cantilever with proof masses at both end points. Interdigitated electrode capacitors are located at the three points on the folded cantilever that are expected to experience maximum bending moment and should produce up to 5V as a function of external vibration. The die has the dimensions of 1.6mm on a side and is designed to be mounted in a TO-18 package transistor-style package. Due to its small size, the self-contained piezoelectric MEMs device should produce 50 picowatts in a 1g vibration environment while occupying little space.

Keywords

piezoelectricmicroelectro-mechanical (MEMS)energy generation
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s12-03
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1. Smits, J. G. and Ballato, A., J Micro ElectroMechanical Systems 3, 105–112(1994)CrossRefGoogle Scholar
2. Berlincourt, A., Curran, D. R., and Jaffe, H., Physical Acoustics D 1 (A), Edited by Mason, W. P. (Academic Press, New York, 1964) 188 Google Scholar
3. Smits, J. G., Dalke, S. I., and Cooney, T.k, Sensors and Actuators 28, 41–61 (1991)CrossRefGoogle Scholar
4. Mead, C. and Conway, L., Introduction to VLSI Systems (Addison-Wesley, California, 1980)Google Scholar