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Piiotoelectronic Proiioerties Of Amorpiious Silicon/Silicon Oxide Heterostructures

  • F. Carasco (a1), J. Mort (a1), F. Jansen (a1) and S. Grammatica (a1)

A glow-discharge deposited a-Si:H/insulator heterostructu re has been characterized by a range of measurements including optical absorption, internal photoemission, xerographic discharge and spectral dependence of photoconductivity. Efficient injection of photocarriers from a-Si:H into, and transport through, films of SiOx:N:H up to 10 μm thick has been achieved. Unlike the conventional thermal oxide on Si, no significant energy barrier to injection is fotInd in the plasma deposited heterostructure. The use of the structure as a potential xerographic device is demonstrated. A mobility lifetime product as high as 6 x 10-10 cm2/volt is found for electronsin the SiOx:N:H.

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