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Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique

  • A.A. Maznev (a1), M.J. Banet (a1), M. Gostein (a1), R.B. Hanselman (a1), M.A. Joffe (a1), R. Sacco (a1) and K.A. Nelson (a2)...
Abstract
ABSTRACT

An all-optical technique based on laser excitation and detection of surface acoustic waves is capable of precise, fast, noncontact and nondestructive measurements of metal film thickness. The technique is integrated into a compact and robust instrument. Applications to metal interconnect process control in integrated circuit technology are presented.

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1. See e.g. Pramanik D. and Bothra S., Future Fab Intl. 1, 183 (1998).
2.Banet M., Fuchs M., Belanger R., Hanselman J. B., Rogers J. A., and Nelson K. A., Future Fab Intl. 4, 297 (1998).
3.Duggal A.R., Rogers J.A., and Nelson K.A., J. Appl. Phys. 72, 2823 (1992).
4.Rogers J. A., Fuchs M., Banet M.J., Hanselman J. B., Logan R., and Nelson K. A., Applied Phys. Letters 71, 225 (1997).
5.Banet M. J., Fuchs M., Rogers J. A., Reinhold J. H., Knecht J. M., Rothschild M., Logan R., Maznev A. A., and Nelson K. A., Applied Physics Letters 73, 169, 13 (1998).
6.Rogers J.A. and Nelson K.A., IEEE Trans. Ultrason. Ferroelect.Freq. Control 42, 555 (1995).
7.Kading O.W., Skurk H., Maznev A.A., and Matthias E., Appl. Phys. A 61, 253 (1995).
8.Rogers J.A. and Nelson K.A., J. Adhesion 50, 1 (1995).
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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