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Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique

  • A.A. Maznev (a1), M.J. Banet (a1), M. Gostein (a1), R.B. Hanselman (a1), M.A. Joffe (a1), R. Sacco (a1) and K.A. Nelson (a2)...

An all-optical technique based on laser excitation and detection of surface acoustic waves is capable of precise, fast, noncontact and nondestructive measurements of metal film thickness. The technique is integrated into a compact and robust instrument. Applications to metal interconnect process control in integrated circuit technology are presented.

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3. A.R. Duggal , J.A. Rogers , and K.A. Nelson , J. Appl. Phys. 72, 2823 (1992).

4. J. A. Rogers , M. Fuchs , M.J. Banet , J. B. Hanselman , R. Logan , and K. A. Nelson , Applied Phys. Letters 71, 225 (1997).

5. M. J. Banet , M. Fuchs , J. A. Rogers , J. H. Reinhold , J. M. Knecht , M. Rothschild , R. Logan , A. A. Maznev , and K. A. Nelson , Applied Physics Letters 73, 169, 13 (1998).

6. J.A. Rogers and K.A. Nelson , IEEE Trans. Ultrason. Ferroelect.Freq. Control 42, 555 (1995).

7. O.W. Kading , H. Skurk , A.A. Maznev , and E. Matthias , Appl. Phys. A 61, 253 (1995).

8. J.A. Rogers and K.A. Nelson , J. Adhesion 50, 1 (1995).

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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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