Skip to main content

Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique

  • A.A. Maznev (a1), M.J. Banet (a1), M. Gostein (a1), R.B. Hanselman (a1), M.A. Joffe (a1), R. Sacco (a1) and K.A. Nelson (a2)...

An all-optical technique based on laser excitation and detection of surface acoustic waves is capable of precise, fast, noncontact and nondestructive measurements of metal film thickness. The technique is integrated into a compact and robust instrument. Applications to metal interconnect process control in integrated circuit technology are presented.

Hide All
1. See e.g. Pramanik D. and Bothra S., Future Fab Intl. 1, 183 (1998).
2.Banet M., Fuchs M., Belanger R., Hanselman J. B., Rogers J. A., and Nelson K. A., Future Fab Intl. 4, 297 (1998).
3.Duggal A.R., Rogers J.A., and Nelson K.A., J. Appl. Phys. 72, 2823 (1992).
4.Rogers J. A., Fuchs M., Banet M.J., Hanselman J. B., Logan R., and Nelson K. A., Applied Phys. Letters 71, 225 (1997).
5.Banet M. J., Fuchs M., Rogers J. A., Reinhold J. H., Knecht J. M., Rothschild M., Logan R., Maznev A. A., and Nelson K. A., Applied Physics Letters 73, 169, 13 (1998).
6.Rogers J.A. and Nelson K.A., IEEE Trans. Ultrason. Ferroelect.Freq. Control 42, 555 (1995).
7.Kading O.W., Skurk H., Maznev A.A., and Matthias E., Appl. Phys. A 61, 253 (1995).
8.Rogers J.A. and Nelson K.A., J. Adhesion 50, 1 (1995).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 2 *
Loading metrics...

Abstract views

Total abstract views: 41 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 21st November 2017. This data will be updated every 24 hours.