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Preparation of The Double-Sided YBa2Cu3O7-δ Thin Film by Hot-Wall Type Mocvd

Published online by Cambridge University Press:  15 February 2011

Y. Ito ,
M. Iwata ,
Y. Yoshida ,
Y. Takai  and
I. Hirabayashi
Y. Ito
Affiliation:
Superconductivity Research Laboratory, ISTEC, Nagoya 456, Japan
M. Iwata
Affiliation:
Department of Electrical Engineering & Electronics, Nagoya University, Nagoya 464–01, Japan
Y. Yoshida
Affiliation:
Superconductivity Research Laboratory, ISTEC, Nagoya 456, Japan
Y. Takai
Affiliation:
Department of Electrical Engineering & Electronics, Nagoya University, Nagoya 464–01, Japan
I. Hirabayashi
Affiliation:
Superconductivity Research Laboratory, ISTEC, Nagoya 456, Japan
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Abstract

A hot-wall type metal organic chemical vapor deposition (MOCVD) apparatus has been developed for the deposition of the YBa2Cu3O7-δ (YBCO) films using liquid metal organic sources on arbitrary shaped substrates. By improving the reactor shape and gas flow of the source materials, we succeeded in fabricating the double-sided YBCO films for electronic and microwave devices and the YBCO-coated conductor on oxide fiber for power applications. Tc(zero)'s of the YBCO film on both sides of the LaAlO3 (100) substrate were 90K and 86K, respectively. The films on the facet of the single crystalline SrTiO3 fiber showed the single phase c-axis orientation with biaxially alignment in the a / b plane.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 474: Symposium L – Epitaxial Oxide Thin Films III , 1997 , 125
Copyright
Copyright © Materials Research Society 1997

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References

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