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Role of Photoeffects in Integrated Rapid Isothermal Processing

Published online by Cambridge University Press:  28 February 2011

R. Singh ,
S. Sinha ,
R.P.S. Thakur  and
N.J. Hsu
R. Singh
Affiliation:
Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634-0915
S. Sinha
Affiliation:
School of Electrical Engineering and Computer Science, University of Oklahoma, Norman, OX 73019
R.P.S. Thakur
Affiliation:
School of Electrical Engineering and Computer Science, University of Oklahoma, Norman, OX 73019
N.J. Hsu
Affiliation:
School of Electrical Engineering and Computer Science, University of Oklahoma, Norman, OX 73019
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Abstract

Rapid isothermal processing (RIP) based on incoherent radiation as the source of energy is emerging as a practical alternative to furnace processing. In this paper, we show that in addition to the well established short time processing feature, RIP can also be used as a reduced substrate temperature processing technique.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 224: Symposium F – Rapid Thermal and Integrated Processing I , 1991 , 197
Copyright
Copyright © Materials Research Society 1991

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References

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