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Rutherford Scattering-Channeling Analysis of Semiconductor Interfaces

Published online by Cambridge University Press:  15 February 2011

L. C. Feldman
L. C. Feldman*
Affiliation:
Bell Laboratories, Murray Hill, NJ07974, (U.S.A.)
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Abstract

The main concepts in ion scattering analysis of interfaces are reviewed and relevant literature is cited.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 18: Symposium C – Interfaces and Contacts , 1982 , 3
Copyright
Copyright © Materials Research Society 1982

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References

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