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Silver Metallization with Reactively Sputtered TiN Diffusion Barrier Films

Published online by Cambridge University Press:  17 March 2011

L. Gao ,
J. Gstöttner ,
R. Emling ,
Ch. Linsmeier ,
M. Balden ,
A. Wiltner ,
W. Hansch  and
D. Schmitt-Landsiedel
L. Gao
Affiliation:
Institute for Technical Electronics, Technical University Munich, D-80333, Munich, Germany
J. Gstöttner
Affiliation:
Institute for Technical Electronics, Technical University Munich, D-80333, Munich, Germany
R. Emling
Affiliation:
Institute for Technical Electronics, Technical University Munich, D-80333, Munich, Germany
Ch. Linsmeier
Affiliation:
Max-Planck-Institut für Plasmaphysik, EURATOM Association, D-85748, Garching, Germany
M. Balden
Affiliation:
Max-Planck-Institut für Plasmaphysik, EURATOM Association, D-85748, Garching, Germany
A. Wiltner
Affiliation:
Max-Planck-Institut für Plasmaphysik, EURATOM Association, D-85748, Garching, Germany
W. Hansch
Affiliation:
Institute for Technical Electronics, Technical University Munich, D-80333, Munich, Germany
D. Schmitt-Landsiedel
Affiliation:
Institute for Technical Electronics, Technical University Munich, D-80333, Munich, Germany
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Abstract

The physical and electrical properties as well as thermal stability of reactively sputtered titanium nitride (TiN) film serving as a diffusion barrier was studied for silver (Ag) metallization. The thermal stability of Ag/TiN metallizations on Si with 12-nm-thick TiN barriers, as-deposited and after annealing at 300-650°C in N2/H2 for 30 min, was investigated with sheet resistance measurement, X-ray diffraction, focused ion beam-scanning electron microscopy, atomic force microscopy and X-ray photoelectron spectroscopy. According to electrical measurement no change of sheet resistance was found after annealing at 600°C, but an abrupt rise appeared at 650°C annealing. There are two causes by which the Ag/TiN/Si structure became degraded. One is agglomeration of the silver layer, and the other is oxidation and diffusion which are also associated problems during thermal annealing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 812: Symposium F – Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2004 , 2004 , F8.3
Copyright
Copyright © Materials Research Society 2004

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