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Single Crystal Silicon Membranes

Published online by Cambridge University Press:  21 February 2011

Andres Fernandez ,
P. Hren ,
K. C. Lee  and
J. Silcox
Andres Fernandez
Affiliation:
National Nanofabrication Facility and School of Applied and Engineering Physics Cornell University, Ithaca, NY 14853
P. Hren
Affiliation:
National Nanofabrication Facility and School of Applied and Engineering Physics Cornell University, Ithaca, NY 14853
K. C. Lee
Affiliation:
National Nanofabrication Facility and School of Applied and Engineering Physics Cornell University, Ithaca, NY 14853
J. Silcox
Affiliation:
National Nanofabrication Facility and School of Applied and Engineering Physics Cornell University, Ithaca, NY 14853
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Abstract

Self-supporting, thin single crystal membranes can be fabricated from silicon wafers using ion implantation, anodic etching and subsequent annealing. Typically, membranes approximately 1200Å thick and about 250μm in diameter are formed in wafers 4 mil thick. Discs surrounding the membranes can be cut out to provide suitable TEM samples. In this paper, the steps for preparing such samples are presented with as much attention paid to experimental details as possible.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 115: Symposium W – Specimen Preparation for Transmission Electron Microscopy of Materials I , 1987 , 119
Copyright
Copyright © Materials Research Society 1988

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References

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