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Solid phase crystallization of hot-wire CVD amorphous silicon films

  • David L. Young (a1), Paul Stradins (a1), Eugene Iwaniczko (a1), Bobby To (a1), Bob Reedy (a1), Yanfa Yan (a1), Howard M. Branz (a1), John Lohr (a2), Manuel Alvarez (a3), John Booske (a3), Amy Marconnet (a3) and Qi Wang (a1)...
Abstract
Abstract

We measure times for complete solid phase crystallization (SPC) of hydrogenated amorphous silicon (a-Si:H) thin films that vary eight orders of magnitude, from a few ms to a few days. The time-to-crystallization activation energy is consistent with literature values of approximately 3.4 eV but the prefactor is markedly different for hot-wire chemical vapor deposition (HWCVD) films than for plasma-enhanced (PE) CVD films. The crystallized films were 0.3 – 2 μm thick, and deposited by high deposition rate (10-100 Å/s) HWCVD or standard PECVD onto glass substrates. We annealed these a-Si:H films over a wide temperature range (500 to 1100 °C) using techniques including simple hot-plates and tube furnaces, rapid thermal annealing by a tungsten-halogen lamp, and microwave electromagnetic heating at 2.45 GHz (magnetron) and 110 GHz (gyrotron).

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[1] Green M. A., Basore P. A., Chang N., Clugston D., Egan R., Evans R., Hogg D., Jarnason S., Keevers M., Lasswell P., O'Sullivan J., Schubert U., Turner A., Wenham S. R., and Young T., Crystalline silicon on glass (CSG) thin-film solar cell modules. Solar Energy Materials and Solar Cells 77, 857 (2004).
[2] Pangal K., Sturm J. C., and Wagner S., Integrated amorphous and polycrystalline silicon thin-film transistors in a single silicon layer. IEEE Transactions on Electron Devices 48, 707 (2001).
[3] Mahan A. H., Xu Y., Williamson D. L., Beyer W., Perkins J. D., Vanecek M., Gedvilas L. M., and Nelson B. P., Structural properties of hot wire a-Si:H films deposited at rates in excess of 100 Å/s. Journal of Applied Physics 90, 5038 (2001).
[4] Nelson B. P., Xu Y., Mahan A. H., Williamson D.L., and Crandall R. S., in Spring MRS, San Francisco, 2000).
[5] Stradins P., Young D. L., Branz H. M., and Wang Q., Spr. MRS A16.1, San Francisco, CA, (2005).
[6] Young D. L., Coutts T. J., and Kaydanov V. I., Density-of-States Effective Mass and Scattering Parameter Measurements by Transport Phenomena in Thin Films. Review of Scientific Instruments 71, 462 (2000).
[7] Roy B., RTA of a-Si films. Poster 19.5, MRS 2005 (2005).
[8] Morimoto R., Izumi A., Masuda A., and Matsumura H., Low-resistivity phosphorous-doped polycrystalline silicon thin films formed by catalytic chemical vapor deposition and successive rapid thermal annealing. Jpn. J. Appl. Phys. 41, 501 (2002).
[9] Li S. S., Semiconductor Physical Electronics (Plenum, New York, 1993).
[10] Masaki Y., LeComber P. G., and Fitzgerald A. G., Solid phase crystallization of thin films of Si prepared by plasma-enhanced chemical vapor deposition. J. Appl. Phys. 74, 129 (1993).
[11] Mahan A. H., Williamson D. L., and Furtak T. E., in MRS, edited by Wagner S., Hack M., Schiff E. A., Schropp R. and Shimizu I. (MRS, San Francisco, CA, 1997), Vol. 467, p. 657.
[12] Baugh J., Han D., Kleinhammes A., Liu C., Wu Y., and Wang Q., Microstructure and dynamics of hydrogen in a-Si:H detected by nuclear magnetic resonance. Journal of Non-Crystalline Solids 266-269, 185 (2000).
[13] Thompson K., Gianchandani Y. B., Booske J., and Cooper R. F., Direct Silicon-Silicon bonding by electromagnetic induction heating. Journal of Microelectromechanical Systems 11, 285 (2002).
[14] Thompson K., Booske J. H., Ives R. L., Lohr J., Gorelov Y., and Kajiwara K., University of Wisconsin private comunication (2002).
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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