Skip to main content Accessibility help
×
×
Home

The Stepwise Cross-sectional Crystalline Analysis of the Stress Induced Voiding in Cu Interconnect

  • Hyo-Jong Lee (a1), Heung Nam Han (a2), Suk Hoon Kang (a3), Jeong-Yun Sun (a4) and Kyu Hwan Oh (a5)...

Abstract

In a crystallographic study of stress induced voiding of copper interconnect, the planar electron backscattered diffraction analysis showed that the void was initiated at the triple junction of the grain boundaries, not at the junction of the twin boundary and grain boundary. By using stepwise cross-sectional crystalline investigation for the void, it was possible to rebuild 3D crystalline structure near the void. From the stress calculation based on the measured crystalline structures, the hydrostatic stress was highly concentrated at the triple junction of the twin boundary and grain boundary, but experimentally, there was no voiding at that. The voiding in the copper interconnect may depend mainly on the boundary instability.

Copyright

References

Hide All
1 Ogawa, E.T., McPherson, J.W., Rosal, J.A., Dickerson, K. J., Chiu, T. –C., Tsung, L. Y., Jain, M. K., Bonifield, T. D., Ondrusek, J. C., and McKee, W. R., Proceedings of the 40th Annual International Reliability Physics Symposium, 2002, p. 312.
2 Lee, Sun-Jung, Lee, Soo-Geun, Suh, Bong-Suk, Shin, Hongjae, Lee, Nae- In, Kang, Ho-Kyu and Suh, Gwangpyuk, Proceedings of IEEE International Interconnect Technology Conference, 2005, p. 108.
3 Heino, P., Peronodi, L., Kaski, K. and Ristolainen, E., Phys. Rev. B 60, 14625 (1999).
4 Wolf, D., Acta metall. 37, 1983 (1989).
5 Randle, V. and Engler, O., Introduction to Texture Analysis Macrotexture, Microtexture and Orientation Mapping (Gordon and Breach Science Publishers, The Netherlands, 2000), pp. 224236.
6 Lee, Hyo-Jong, Kim, Dong Ik, Ahn, Jeong Hun and Lee, Dong Nyung, Thin Solid Films 474, 250 (2005).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Keywords

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed